Helios 5 CX DualBeam
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Helios 5 CX DualBeam Enabling breakthrough innovations with DualBeam technology—faster and easier than ever before The Thermo Scientific Helios 5 DualBeam redefines the standard in sample preparation and three-dimensional characterization through the most advanced focused ion and electron beam performance, exclusive software, and an unprecedented level of automation and ease-of-use. The Thermo Scientific™ Helios™ 5 CX DualBeam is part of the fifth generation of the industry-leading Helios DualBeam family. It is carefully designed to meet the needs of scientists and engineers, combining the innovative Thermo Scientific™ Elstar™ Electron Column for ultra-high-resolution imaging and the highest materials contrast with the superior Thermo Scientific™ Tomahawk™ HT Focused Ion Beam (FIB) Column for the fastest, easiest and most precise high-quality sample preparation. In addition to the most advanced electron and ion optics, the Helios 5 CX DualBeam incorporates a suite of state-of-theart technologies that enables simple and consistent highresolution S/TEM and atom probe tomography (APT) sample preparation, as well as the highest-quality subsurface and 3D characterization, even on the most challenging samples. High-quality TEM sample preparation Scientists and engineers constantly face new challenges that require highly localized characterization of increasingly complex samples with ever smaller features. The latest technological innovations of the Helios 5 CX DualBeam, in combination with the easiest to use, comprehensive software and Thermo Fisher Scientific application expertise, allow for the fastest and easiest preparation of site-specific HR-S/TEM samples for a wide range of materials. In order to achieve the highest quality results, final polishing with low-energy ions is required to minimize surface damage on the sample. The Tomahawk HT FIB Column not only delivers high-resolution imaging and milling at high voltages, but also has excellent low voltage performance, enabling the creation of high-quality TEM lamella. Key benefits High-quality, site-specific sample preparation for TEM and APT using the new high-throughput Tomahawk HT Ion Column with unmatched low-voltage performance Fastest and easiest, fully automated, unattended, multisite in situ and ex situ TEM sample preparation and crosssectioning using optional AutoTEM 5 Software Shortest time to nanoscale information for users with any experience level using best-in-class Elstar Electron Column featuring SmartAlign and FLASH technologies The most complete sample information with sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors The highest-quality, multi-modal subsurface and 3D information with the most precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software Fast, accurate and precise milling and deposition of complex structures with critical dimensions less than 10 nm Easiest sample handling and navigation with high-flexibility 110 mm stage, multi-purpose sample holder and Nav-Cam Camera Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as DCFI and Smar

Highest quality subsurface and 3D information Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. The Helios 5 CX DualBeam with optional Thermo Scientific™ Auto Slice & View™ 4 Software allows for the highest-quality, fully automated acquisition of multi-modal 3D datasets, including, among others, BSE imaging for maximum materials contrast, energy dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) for microstructural and crystallographic information. Combined...

Electron optics • Elstar ultra-high-resolution field emission SEM column with: – Magnetic immersion objective lens – High-stability Schottky field emission gun to provide stable high-resolution analytical currents • SmartAlign: user-alignments-free technology • 60-degree dual objective lens with pole piece protection allows tilting of larger samples • Automated heated apertures to ensure cleanliness and touchfree aperture exchange • Thermo Scientific In-chamber Nav-Cam Camera for sample navigation* • Retractable, low-voltage, high-contrast, directional, solid-state backscatter electron...

• Microscope-controlling and support computers seamlessly sharing one keyboard, mouse and monitors • Thermo Scientific™ EasyLift™ NanoManipulator for precise in situ sample manipulation • Multifunctional control panel* • Remote control and imaging* • Thermo Scientific™ QuickLoader™ Vacuum Technology: Loadlock for fast sample exchange without breaking system vacuum Supporting software • “Beam per view” graphical user interface concept, with up to four simultaneously active quads • Thermo Scientific™ SPI™ (simultaneous FIB patterning and SEM imaging), iSPI™ (intermittent SEM imaging and FIB...