VEGA3
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TESCAN PERFORMANCE IN NANOSPACE

3rd Generation ofVEGASEMs VEGA3 is a versatile thermionic emission SEM system intended for both high- and low-vacuum operations designed with respect to a wide range of SEM applications and needs in today's research and industry. VEGA3 provides users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or scripting for user-defined applications, all while maintaining the best price to performance ratio. ■ High Resolution Imaging...

VEGA3 Configurations VEGA3 SB A high vacuum model of SEM with 3-axis motorized stage for investigation of small conductive samples. VEGA3 SB – EasyProbe The EasyProbe is a favorable package of a scanning electron microscope fully integrated with a selected EDX microanalyser. EasyProbe is available in both high vacuum and variable pressure variant. The system is delivered with a touch screen. VEGA3 LMH / XMH / GMH The large / extra-large / giant-­ chamber models operate at high vacuum for the investigation of conductive samples with extraordinary imaging quality. VEGA3 SBU / LMU / XMU / GMU...

SBH EasyProbe/SBH SBU EasyProbe/SBU LMH/XMH/GMH Image Processing B / B Analysis & Measurement B / B Object Area B / B Hardness B / B Tolerance B / B Multi Image Calibrator B / B Switch-Off Timer B / B 3D Scanning B / B EasySEM™ B / B Live Video B / B Histogram B / B Easy EDX Integration Software B / B B / B B / B / B B / B / B B / B B / B / B B / B / B B / B B / B / B B / B / B B / B B / B / B B / B / B B / B B / B / B B / B / B B / B B /...

SB Chamber LM Chamber XM Chamber GM Chamber Internal size 160 mm 230 mm 290 mm (w) x 340 mm (d) 340 mm (w) x 315 mm (d) Mechanical - by means Pneumatic or optionally Pneumatic or optionally Integrated active vibration of rubber elements Mechanic (rubber elements Integrated active vibration isolation option) Integrated active vibration isolation Specimen stage Specimen stage Specimen stage Specimen stage in SB Chamber in LM Chamber in XM Chamber in GM Chamber Type Movements eucentric 3-axis motor. compucentric without /with position...

Technical specifications SB EasyProbe/SB Tungsten heated cathode Tungsten heated cathode / optionally LaB6 Chamber vacuum Chamber – High – vacuum mode Chamber – Medium – vacuum mode Chamber – Low – vacuum mode Column vacuum Gun vacuum for LaB6 Magnification continuous from (for 5’’ image width in Continual Wide Field/Resolution) Electron optics working modes High-vacuum mode Resolution, Depth, Field, Wide Field, Channelling Low-vacuum mode Resolution, Depth Probe current Scanning speed From 20 ns to 10 ms per pixel adjustable in steps or continuously Scanning features Focus window (shape,...