TELEDYNE HASTINGS INSTRUMENTS IONIZATION GAUGE ELECTRONICS AND GAUGE TUBES DESIGN FEATURES The Teledyne Hastings Instruments IGE-3000 line of Ionization Gauge Tubes and Electronics provides the user with accurate, repeatable pressure measurement starting in the medium vacuum range and continuing through into the ultrahigh vacuum range. • Range — 10-10 Torr to 10-2 Torr • Miniature Bayard-Alpert Tube • 24 VDC Input (11.5 VDC – 30 VDC) • Stable Accurate Electrode Voltages • Precision Electrometer • RS232/485 Communication • Two Independent TTL Setpoints The electronics package consists of four PC boards. The first board contains a precision electrometer which is capable of measuring ion currents to 1 pA. This board also contains a highly stable anode supply and filament drive circuit. • Automatic or Selectable Emission Current • Dual Filaments with Status Indicators • Automatic High Pressure Shutdown • Capable of Remote Filament Operation • CE Compliant: EN61326 Thin Film Coating Plasma Processing Vacuum Furnace Sputtering Calibration Systems Accelerator Lighting Manufacturing CVD A complete measurement system consists of a dual-filament miniaturized Bayard-Alpert ionization gauge tube and electronics package. The gauge tube includes several innovations over conventional Bayard-Alpert tubes. For example, the filaments are precisely tensioned to give repeatable performance. In addition, all tube materials are selected and processed to yield consistent structural integrity. The second board is a power supply board which contains power conversion circuits for the entire electronics package. Utilizing a separate board ensures that the precision electronics of the first board are isolated from power conversion noise. A CPU board contains the instrument’s firmware. Calibration coefficients are stored on a memory chip; calibration services are available. The top PC board contains a bright LED display and gauge status indicators. An i

MODEL IGE-3000 Selection Chart Typical instrument ordering/options number: Pressure Range ±15% of reading for the range 1x10-2 to 1x10-8 Torr Emission Current X-Ray Limit Filament Bias Potential Grid Potential Operating Temperature Digital Communications Bakeout Temperature 200°C with electronics removed Electrical Noise Immunity Selection Chart Typical gauge tube ordering/options number: System Connection Complies with IEC 61010-1 (Safety requirements for measurement, control, and laboratory use) Conflat™ is a trademark of Varian Associates, Inc. Teledyne Hastings Instruments reserves the right...