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HPM 2002 digital vacuum gauge

HPM 2002 digital vacuum gauge
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www.teledyne-hi.com TELEDYNE HASTINGS INSTRUMENTS Modell 2002® FEATURES • Combined Pirani and Piezoresistive Sensors in a Single Tube • Wide Dynamic Range: 1000 Torr to 1x10-4 Torr • Automatic Crossover Calibration • Attitude Insensitive – Can Be Mounted in Any Orientation • Fast Dynamic Response Time • Compact Rugged Design • Burst Pressure 150 PSIG • Linear Per Decade Output Signal • Custom Outputs Available APPLIICATIIONS • Wide Range Vacuum Applications • Process Control and Test • Ultra-Fast Response • General Vacuum Control • Vacuum Furnace Control • Loadlock System • Transformer “DeGAS” System • Sputtering Chambers DUAL SENSOR VACUUM GAUGE DESCRIIPTIION The Model 2002, Dual Sensor Vacuum Gauge, is a wide range vacuum instrument consisting of a digital microprocessor- based display unit, two sensing elements (micro- Pirani and piezoresistive bridge) in a single tube shell, and an interconnecting cable. Together, these components provide accurate vacuum measurement over 7 decades of pressure from 1x10-4 Torr to 1000 Torr. This instrument is a new design approach based on over 60 years of experience by Teledyne Hastings Instruments (THI) with well-known pressure measurement techniques. A single tube contains both a THI patented thin film Pirani sensor and a piezoresistive sensor in a small, rugged and inexpensive package. The piezoresistive bridge is a direct force sensor which gives very accurate readings at high pressures from atmosphere down to less than 1 Torr without the concerns of gas composition. The thin film Pirani measures pressures from a few Torr down to 1x10-4 Torr. An algorithm residing in the microprocessor ensures a seamless transition between sensors. Additionally, the two sensor outputs are used in a cross calibration mode to give even higher accuracy. New Sensor Design The Model 2002 sensors are mounted in a rugged corrosive resistant 316 stainless steel tube. The small packaging reduces the sensor’s internal volume, significantly improving response time. The tube can be mounted in any orientation with no effect on calibration and is far more rugged than standard fragile convection driven Pirani tubes. The two sensors reside on a single gold plated Kovar header.

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www.teledyne-hi.com Design Features (cont) Hastings Instruments reserves the right to change or modify the design of its equipment without any obligation to provide notification of change or intent to change. Viton® is a registered trademark of Dupont Performance Elastomers Kalrez® Is a registered trademark of DuPont Dow Elastomers Teflon®is a registered trademark of E.I. Dupont de Nemours & Co. VCR® is a registered trademark of Swagelok Company. This header is welded into the stainless tube shell and will withstand positive pressures of over 150 psi. Note: Calibration is stored within tube...

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www.teledyne-hi.com Performance Measuring Range 1x10-4 Torr to 10+3 Torr Ambient Temperature Operating Range & Compensation 0°C to 50°C Accuracy (Based on N2 @ 23°C) ±1.5% of reading (1000 Torr to 50 Torr) ±20% of reading (50 Torr to 1x10-3 Torr) Output (Standard) 1.0 – 4.5 Volts (0.5 VDC Linear per decade) Process Control 2 TTL Outputs 1 TTL Remote Zero Input Digital Readout Three green LED(0.6") – Resolution is a three digit floating point mantissa (plus exponent) Input Voltage 90-260 VAC, 50 to 60 Hz, IEC receptacle. A 6 ft., 3 wire ground power cord is provided with each unit. Stability...

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www.teledyne-hi.com Outline Drawing

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www.teledyne-hi.com Outline Drawing

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www.teledyne-hi.com Selection Chart 01 02 00 01 02 03 99 01 02 03 HPM-2002 04 05 06 07 12 14 15 16 17 01 D01 02 D02 03 D99 04 05 06 07 08 IEC Power Cord Panel mounting Hardware *Note: Gauge tube and cable are sold separately 2002 Gauge Tube 9-Pin "D" Connector-Kit 2nd 9-Pin "D" Connector-Kit (for RS and 4-20 mA options only) Shipment includes Gas configuration Nitrogen (Standard) Argon Helium Water Vapor Other (consult factory) Output Signal Dual 10 V Linear RS-485 Full Duplex RS-485 Half Duplex Dual 10 V Linear w/Dual Control Relays (1A) Analog with 2 TTL set points (Std) RS-232 Dual...

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