TELEDYNE HASTINGS INSTRUMENTS DESIGN FEATURES The Teledyne Hastings Instruments (THI) Model HFM Mass Flowmeter and HFC Mass Flow Controller represent over 55 years of experience in designing and manufacturing reliable, high quality mass flow instruments. The HFM/HFC Series flow instrument can be set up to measure and control any of a wide variety of gases under many different pressure conditions as required. The Models HFM-E-200 and HFC-E-202 were specifically designed to meet the footprint dimensions of the Tylan® FC-260 model. They are based on refinements to the exisitng Hastings 200 Series flow product line. The HFM/HFC Series of flow instruments is based on a modular design. At the heart of each instrument is an insulated thermo electric sensor which provides enhanced zero stability and allows installation in any orientation plane in most low pressure applications. This sensor is designed to be removable/replaceable in the field to virtually eliminate long down time due to clogging. Additionally, the HFM/HFC design features an integral filter and an easily replace-able closed loop electronics card.* The HFC also features an externally adjustable valve with easily replaceable flow orifices. All of these standard features, when coupled with the instrument’s inherent linear response to flow changes and THI’s long-proven reputation for quality, result in the finest flowmeters and flow controllers available today. Optional Features Fittings O-ring seals High pressure rating (1000 psig) 4-20 mA converters Cleaned for oxygen service Accessories Power supplies/readouts Interconnecting cables *Note: After changing components, instruments require recalibration to meet accuracy specifications. Models HFM-E-200, HFC-E-202 FEATURES • ±1% of Full-Scale Accuracy1 • Proven Reliability • Range — 10 to 30,000 sccm (N2 Equivalent) • NIST Traceable Calibration • Tylan® FC-260 Footprint APPLICATIONS • Leak Testing • Medical Research • Vapor Deposition • R&D and Process Flows • Semiconductor Processes • Pollution Monitoring • Gas Blending • Chromatography HFM-E-200 / HFC-E-202 LOW CAPACITY FLOWMETERS AND CONTROLLERS Tylan® is a registered trademark of the Mykrolis Corporation.

MODELS HFM-E-200, HFC-E-202 SPECIFICATIONS HFM-E-200 Accuracy1 and Linearity ±1% F.S. Repeatability ±0.075% Rdg +0.05% F.S. (max.) Standard Pressure Rating 500 psig Pressure Coefficient +0.0067% Rdg/psi (0-1000 psig N2) High-Pressure Option Proof tested to 1500 psig Leak Integrity < 1x10-9 sccs Temperature Coefficient Zero ±0.1% F.S./oC (max.) (10°-50°C) Span ±0.05% Rdg/oC (max.) STP 0°C and 760 Torr Input Power ±15 VDC at ±45 mA (max.) Flow Signal 0-5.00 VDC or 4-20 mA (inherently linear) Wetted Material 316 SS, Viton®, 87/13 Au/Ni Braze Connector 10 x 2 Edge card Fittings Available Swage (1/8",...

Model HFM-E-200 MODELS HFM-E-200, HFC-E-202 Model HFC-E-202 All dimensions shown are in inches [mm].

Your Customer Service Representative Telephone: (757) 723-6531 Toll Free: (800) 950-2468 Fax: (757) 723-3925 World Wide Web: http://www.teledyne-hi.com E-mail: [email protected] P.O. Box 1436 Hampton, VA 23661 MODELS HFM-E-200, HFC-E-202 PB 161-10/05 © Teledyne 2005 All Rights Reserved. Typical instrument ordering/options number: Model No. Circuit Output Fittings O-Rings Working Calibration Board Pressure Type HFM-E-200 01 01 01 01 01 01 Order No. Options Circuit Board 01 Standard Output 01 0-5 Volts (Standard) 02 4-20mA Fittings 01 1/4" Swagelok (Standard) 02 1/8" Swagelok 03...