TELEDYNE HASTINGS MEDIUM CAPACITY FLOWMETERS AND CONTROLLERS INSTRUMENTS DESIGN FEATURES Teledyne Hastings Instruments (THI) products represent over 60 years of experience in the design and manufacture of mass flow products. The 300 Series is a culmination of this experience with patented technologies that make these the finest flowmeters and controllers available today. FEATURES • ±1.0% of Full-Scale Accuracy1 • Rapid Settling Times HFM-301 ≤ 0.4 sec HFC-303 ≤ 2.0 sec • Range — 25 to 1000 slm (Air Equivalent) • Operating Pressures to 500 PSI or Higher • NIST Traceable Calibration Leak Testing Research Vapor Deposition R&D and Process Flows Semiconductor Processes Pollution Monitoring Gas Blending Chromatography Power Supplies Available The THI Mass Flow 300 Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±1.0% of full scale. THI mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (air & N2), then a gas conversion factor (GCF) is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order. These products contain a number of features that set them apart from other available instruments: (1) They are inherently linear; no linearization circuitry is employed. Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. (2) The output signal is linear for very large overflows and will not come back on scale when a flow an order of magnitude over the full scale flow rate is measured. (3) The instrument incorporates a removable/ replaceable sensor

Optional Features Fittings–VCR, VCO and Swagelok® High pressure rating (1000 psig) Cleaned for oxygen service Pressure Coefficient Leak Integrity *Note: After changing components, instruments require recalibration to meet accuracy specifications. High-Pressure Option Power Supplies with integral Flow Totalizers & Alarm Set Points Interconnecting cables Standard Operating Pressure Temperature Coefficient (zero) < 0.085%/°C of F.S. (0-60°C) Temperature Coefficient (span) < 0.11%/°C of reading (15-60°C) Standard Output Optional Output *Attitude Sensitivity of Zero *Attitude Sensitivity of Span SPECIFICATIONS...

All dimensions shown are in inches [mm].

MODELS HFM-301, HFC-303 Selection Chart Typical instrument ordering/options number: Model No. Circuit Board 1000 psi (1500 proof) Calibration Type NIST 5 Point (Standard) Circuit Board Range Information Viton (Standard) Flow Units __________________________ Standard Conditions* _________________ **3/4" Swagelok required for flows above 300 slm *Referenced to standard temperature and pressure (0°C and 760 Torr, respectively). Selection Chart Typical instrument ordering/options number: Model No. Circuit Board Calibration Type 1000 psi (1500 proof) Calibration Type Circuit Board NIST 5 Point (Standard)...