TELEDYNE HASTINGS INSTRUMENTS DESIGN FEATURES Teledyne Hastings Instruments (THI) products represent over 60 years of experience in the design and manufacture of mass flow products. The 300 Series is a culmination of this experience with patented technologies that make these the finest flowmeters and controllers available today. The THI Mass Flow 300 Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±1.0% of full scale. THI mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (air & N2), then a gas conversion factor (GCF) is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order. These products contain a number of features that set them apart from other available instruments: (1) They are inherently linear; no linearization circuitry is employed. Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. (2) The output signal is linear for very large overflows and will not come back on scale when a flow an order of magnitude over the full scale flow rate is measured. (3) The instrument incorporates a removable/replaceable sensor module. (4) The unit has very fast settling times. Models HFM-301, HFC-303 FEATURES • ±1.0% of Full-Scale Accuracy1 • Rapid Settling Times HFM-301 0.4 sec HFC-303 2.0 sec • Range — 25 to 1000 slm (Air Equivalent) • Operating Pressures to 500 PSI or Higher • NIST Traceable Calibration APPLICATIONS • Leak Testing • Research • Vapor Deposition • R&D and Process Flows • Semiconductor Processes • Pollution Monitoring • Gas Blending • Chromatography HFM-301 HFC-303 MEDIUM CAPACITY FLOWMETERS AND CONTROLLERS Power Supplies Available

MODELS HFM-301, HFC-303 COMMON SPECIFICATIONS HFM-301/HFC-303 Accuracy 1 ± 1.0% of F.S. Repeatability ± 0.07% of F.S. Standard Operating Pressure 500 psi High-Pressure Option 1000 psi (proof tested to 1500 psi) Pressure Coefficient <0.026% of readings/psi (N2) (0-1000 psig) Leak Integrity < 1x10-9 sccs He Temperature Coefficient (zero) < 0.085%/°C of F.S. (0-60°C) Temperature Coefficient (span) < 0.11%/°C of reading (15-60°C) Standard Output 0-5 VDC Optional Output 4-20 mA Connector 15-pin subminiature D *Attitude Sensitivity of Zero < 0.25% of F.S. *Attitude Sensitivity of Span < 0.06% of reading...

Model HFM-301 MODELS HFM-301, HFC-303 Model HFC-303 All dimensions shown are in inches [mm].

Your Customer Service Representative Telephone: (757) 723-6531 Toll Free: (800) 950-2468 Fax: (757) 723-3925 World Wide Web: http://www.teledyne-hi.com E-mail: [email protected] P.O. Box 1436 Hampton, VA 23661 MODELS HFM-301, HFC-303 PB 151-10/05 © Teledyne 2005 All Rights Reserved. Order No. Options Circuit Board 01 Pinout H (Standard) 02 Pinout U 03 Pinout M Output 01 0-5 Volts (Standard) 02 4-20mA Order No. Options Fittings** 01 1/2" VCR® 02 1/2" Swagelok (Standard < 300 slm) 03 1/2" VCO® 04 3/4" Swagelok (Standard > 300 slm) Seals 01 Viton (Standard) 02 Kalrez® 03 Neoprene...