HFM-300/HFC-302
4Pages

Catalog excerpts

TELEDYNE HASTINGS INSTRUMENTS DESIGN FEATURES Teledyne Hastings Instruments (THI) products represent over 60 years of experience in the design and manufacture of mass flow products. The all-metal seal 300 Series Metaline is a culmination of this experience with patented technologies that make these instruments the finest flowmeters and controllers available today. The THI Mass Flow 300 Metaline Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±0.75% of full-scale for .005 to 10 slm and ±1.0% of full-scale for 10 to 25 slm. THI mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen), then a gas conversion factor (GCF) is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order. These products contain a number of features that set them apart from other available instruments: (1) They are inherently linear; no linearization circuitry is employed. Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. (2) The output signal is linear for very large overflows and will not come back on scale when a flow an order of magnitude over the full scale flow rate is measured. (3) The HFM-300 incorporates a removable/replaceable sensor module. Models HFM-300, HFC-302 FEATURES • Accuracy1 ±0.75% of Full-Scale for .005 to 10 slm ±1.0% of Full-Scale for 10 to 25 slm • All-Metal Seals • 4 Ra Finish Available • Settling Times: HFM-300 0.50 sec HFC-302 0.75 sec • Range — 5 to 25,000 sccm (N2 Equivalent) • Large Diameter Sensor Tube • Low Wetted Surface Area • Operating Pressures to 500 psi or higher • NIST Traceable Calibration APPLICATIONS • Leak Testing • Research • Vapor Deposition • R&D and Process Flows • Semiconductor Processes • Pollution Monitoring • Gas Blending • Chromatography HFM-300 HFC-302 METALINE® LOW CAPACITY FLOWMETERS AND CONTROLLERS Power Supplies Available

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MODELS HFM-300, HFC-302 COMMON SPECIFICATIONS HFM-300/HFC-302 Accuracy 1 ± 0.75% of F.S. 5 sccm to 10 slm ± 1.00% of F.S. 10 slm to 25 slm Repeatability ± 0.07% of F.S. Standard Operating Pressure 500 psi High-Pressure Option 1000 psi (proof tested to 1500 psi) Pressure Coefficient 0.01% of reading/psi (N2)(0-50 psig) Leak Integrity < 1x10-9 sccs He Temperature Coefficient (zero) < 0.10%/°C of F.S. (0-60°C) Temperature Coefficient (span) < 0.03%/°C of reading (15-60°C) Standard Flow Ranges 5, 10, 20, 50, 100, 200, 500 sccm 1, 2, 5, 10, 20, 25 slm (N2 equivalent) Standard Output 0-5 VDC...

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MODELS HFM-300, HFC-302 All dimensions shown are in inches [mm]. Models HFM-300 & HFC-302

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Your Customer Service Representative Telephone: (757) 723-6531 Toll Free: (800) 950-2468 Fax: (757) 723-3925 World Wide Web: http://www.teledyne-hi.com E-mail: hastings_instruments@teledyne.com P.O. Box 1436 Hampton, VA 23661 MODELS HFM-300, HFC-302 PB 150-10/05 © Teledyne 2005 All Rights Reserved. Typical instrument ordering/options number: Model No. Circuit Output Fittings Pressure Calibration Board Type HFM-300 01 01 02 01 01 Order No. Options Circuit Board 01 Pinout H (Standard) 02 Pinout U 03 Pinout M Output 01 0-5 Volts (Standard) 02 4-20mA Order No. Options Fittings 01 1/4" VCR® 02...

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