TELEDYNE HASTINGS INSTRUMENTS Everywhereyoulook™ HFM-200 Flow Meter HFC-202 Flow Controller GENERAL PURPOSE FLOW METERS AND FLOW CONTROLLERS • Input Power +/- 15 VDC or +24 VDC (specify when ordering) • Available Flow Ranges: 0 - 10 sccm up to 0 - 25 slm (N2 Equivalent) • NIST Traceable Calibration APPLICATIONS • Gas Blending • Environmental Monitoring • Thin Film Deposition • Leak Testing • Medical Research • Chromatography • R&D BENEFITS • Excellent Stability • Proven Reliability • Outstanding Zero Stability "O C o co The Teledyne Hastings Instruments (THI) Model HFM Mass Flowmeter and HFC Mass Flow Controller represent over 65 years of experience in designing and manufacturing reliable, high quality flow instruments. The HFM/HFC Series of flow instruments is based on a modular design. At the heart of each instrument is an insulated thermal transfer sensor which provides enhanced zero stability. The instrument's inherent linear response to flow changes and THI's long-proven reputation for quality, result in the finest flow meters and flow controllers available today. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen), then a gas conversion factor is used to adjust the output the intended gas. Special calibration for other gases, such as oxygen, helium and argon, are available upon special request. teledyne HASTINGS INSTRUMENTS A Teledyne Technologies Company

Options: Fittings -VCR® VCO® Swagelok® Seals -Kalrez® Neoprene Buna-N Output -0-5 VDC 4-20 mA Cleaned for Oxygen service EMC EN 61326-1 Accessories Power Supplies available with: Integral Flow Totalizer Alarm Set Points Interconnecting cables COMMON SPECIFICATIONS HFM-200/HFC-202 Accuracy 1 SPECIFICATIONS HFM-200 Power Requirements (±15 VDC) Power Requirements (+24 VDC) SPECIFICATIONS HFC-202 Power Requirements (±15 VDC) Power Requirements (+24 VDC) 1 See Product Manual for critical information on instrument accuracy and the use of GCFs (gas conversion factors). Stated accuracy is for nitrogen...

±15 VOLT 24 VOLT (15 PINS) (g pins) FITTING TYPE ELBOW SWAG

Range Information Range _ Flow Units _ Upstream Pressure (min/max) _ Downs ream Pressure (min/max) _ Is downstream pressure dependent on flow resistance? Y/N ^ S*. TELEDYNE HASTINGS INSTRUMENTS A Teledyne Technologies Company Telephone: (757) 723-6531 World Wide Web: http://www.teledyne-hi.com E-mail: [email protected] 804 Newcombe Ave. Hampton, VA 23669 Standard Temperature (OC) and pressure (760 Torr) assumed unless otherwise specified