Mass Flow Meter Mass Flow Controller Range 0 - 5 sccm to 0-25 slm (N2 Equivalent) Excellent Accuracy ±(0.5% of Reading + 0.2% of Full Scale) All-Metal Seals HFC-D-302 Valve Features Kalrez® Seat Touchscreen Display/Control Option 0-5 VDC, 0-10 VDC, 0-20 mA or 4-20 mA I/O RS232 / RS485 Typical Settling Time:  HFM-D-300 < 1 second  HFC-D-302 1 –2 seconds Status LEDs Auto-Zero (HFC-D-302 Controller Only) Totalizer Large Diameter Sensor Tube (low dP) Low Wetted Surface Area Operating Pressures to 500 psi or higher NIST Traceable Calibration Leak Testing High Purity Gas Delivery Thin Film Deposition Gas Blending Pharmaceutical Fuel Cell R&D Environmental Monitoring Medical Research High Accuracy Fast Metering Response Superior Linearity Rapid Controller Settling Time Digital Extended Range Mass Flow Meters & Controllers HFC-D-302B Mass Flow Cont

Description The Digital 300 Series of thermal mass flow meters and controllers from Teledyne are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±(0.5% of reading + 0.2% of full scale) for full scale flow rates from 0-5 sccm to 0-25 slm. The Digital 300 Series uses a thermal-based mass flow sensor. This sensor is designed to provide exceptional linear response to changing flow rates. In addition, the electronics associated with each sensor are precisely tuned to give fast response times. The HFC-D-302A...

Flexible 15-Pin connector for analog I/O LEDs (2) provide status and flow conditions Easily configurable digital communications LEDs (2) provide status and flow conditions

Digital 300 Series Flow Sensor The Digital 300 Series is built using a patented (Patent #6,125,695) flow sensor. The sensor's excellent linearity, in turn, leads to improved accuracy. Flow calibrations are typically performed in N2 or air. The output can then be scaled for use in other gases (see graph to the right). The 300 Series excellent linearity allows the linearity to be retained when switching from the calibration gas to the process gas. The patented sensor contains fast electronic circuitry. This is critical when the flow meter is coupled with a proportional control valve to create a...

Outline Drawings HFM-D-300 & HFC-D-302 A & B Series

Outline Drawing (Surface Mount) - “A” & “B” Series

Input / Output Working Pressure Calibration Records Calibration Type Range Information for all Instruments Each calibration will require the following information: Range Flow Units Gas For the HFC Instruments also Upstream Pressure (maximum & minimum) Downstream Pressure (maximum & minimum) Does the downstream pressure change with flowrate? Y/N For volumetric units the standard temperature and pressure of the unit is also required 0°C & 760 Torr will be used when other values are not specified

Working Pressure Range Information for all Instruments Each calibration will require the following information: Range Flow Units Gas | For the HFC Instruments also Upstream Pressure (maximum & minimum) Downstream Pressure (maximum & minimum) Does the downstream pressure change with flowrate? Y/N For volumetric units the standard temperature and pressure of the unit is also required 0°C & 760 Torrwill be used when other values are not specified ISO 9001 TELEDYNE HASTINGS INSTRUMENTS Everywhereyoulook™ PB-188_09/16 © Teledyne 2016 All Rights Reserved.