Features • RS-232 MODBUS remote support ■ Control up to 2 Ozone Generators ■ Interface with up to 2 Model 452 & 470 Ozone Sensors ■ Control up to 4 Maos Flow; Controllers ■ Control up to 2 Backpressure Controllers ■ Control up to 2 EV Values a Control a water chiller ■ System Interlock Inputs, a Remote system-level controls and status I/O The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller. The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS seiial interface, o| valious dr.'iele digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output. Applications a Chemical Vapor Deposition (CVD) a Atomic Layer Deposition (ALD) a Oxide growth a Surface conditioning a Ashing a Particle Cleaning a Photoresist Removal a Others

— OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000101A (DCN 7917) 07.16.18 TELEDYNE API Eve ry wh e rey o u I oo k' 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • [email protected] www.teledyne-api.com