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OG-5000 Series

OG-5000 Series
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Features ■ High purity ozone ■ High ozone concentrations ■ Low cost of ownership ■ No consumables ■ Compact and modular ■ Proven technology The OG-5000 series of ozone generators is designed to produce high concentrations of ultra clean ozone gas for use in semiconductor applications including CVD, ALD thin film, oxide growth and wet bench cleaning processes. The OG-5000 series has a compact, water cooled design that can be easily integrated with Teledyne API's ozone system controller, ozone leak detectors, ozone concentration monitors and ozone destructs. Its proven technology makes it ideal for a wide range of semiconductor process applications. Applications ■ Chemical Vapor Deposition (CVD) ■ Atomic Layer Deposition (ALD) ■ Oxide growth ■ Surface conditioning ■ Ashing ■ Particle Cleaning ■ Photoresist Removal ■ Others

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Specifications Performance Maximum Ozone Production — OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000099B (DCN 8030) H.20.18 TELEDYNE API Eve ry wh e rey o u I oo k' 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • api-sales@teledyne.com www.teledyne-api.com

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