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Model ODS

Model ODS
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MODEL ODS High-Purity Ozone Deliuery System - Ideal for semiconductor applications - Features ■ High purity water cooled ozone generator up to 350 g/Nm3 ■ State of the art high concentration monitor ■ Mass Flow Controllers to monitor and control the ozone and the feed gases ■ Complete safety interlock and EMO system ■ Supports up to 4 independent servo control loops ■ Mounted in an 19 inch rack exhausted enclosure on casters The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools. Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints. Applications ■ Chemical Vapor Deposition (CVD) ■ Atomic Layer Deposition (ALD) ■ Oxide growth ■ Surface conditioning ■ Particle cleaning ■ Photoresist removal The ODS system includes a multi-channel ■ Ashing ozone leak detector and an exhausted enclosure where all the process gas lines and fittings are double contained. TELEDYNE APIEverywhereyoulook"

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■ High Purity Ozone Generator Up to 350 g/Nm3 ■ Flow rates Up to 100 lpm regulated by built-in MFCs ■ Ozone ouput pressure Regulated to 30 PSIA ■ Controller Up to 4 independent servo control loops ■ Ozone Monitor UV absorption analyzer with ■ Ozone Leak Detection Five channels UV absorption analyzer ■ Feed Gas High Grade O2 with N2 doping ■ Ozone Process Output Channels Up to 4 ■ Enclosure dimensions Exhausted type: 72 x 24 x 31" — OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant...

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