Dissolued Ozone Analyzer Dissolued Ozone analyzer - Ideal for Wet Bench systems and many other wet processes - Features ■ In-situ monitoring ■ In-line, full-flow capability ■ Straight-through flow path ■ No moving parts ■ No consumables ■ Ranges up to 150 mg/L ■ Remote zero calibration ■ High accuracy UV Absorption method ■ Dual optical-path sample sensing technique ■ No regular maintenance required ■ Semiconductor-grade wetted materials ■ Compact Teflon enclosure ■ Teflon7-jacketed interconnection cable The Model 470 Is a state-of-the-art dissolved ozone sensor designed for semiconductor wet bench tools and many other industrial processes. It provides continuous measurement of dissolved ozone in deionized water or sulfuric baths with concentrations above 150 mg/L. The Model 470 is "clean-ready" for high purity semiconductor processes, and is designed to be simply spliced in-line in the recirculation loop of any wet bench tool with flow rates up to 150 SLPM. The Model 470 Sensor incorporates an innovative dual optical-path sample sensing technology to provide unparalleled performance and virtually eliminate the need for a reference liquid measurement. A typical installation consists simply of the 470 sensor and an interconnecting Teflon 7 jacketed cable. The 470 sensor includes the ability to remotely report the concentration that is being measured via analog or digital signals to the wet bench console. Applications ■ Dissolved ozone in liquid phase ■ Semiconductor Wet Bench systems ■ Ultrapure water systems ■ Pharmaceutical industry ■ Water treatment applications ■ Other industrial processes

Specifications ■ Measuring Principle — OZONE INSTRUMENTATION FOR EVERY APPLICATION — 1 Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000103A (DCN 7917) 06.01.18 TELEDYIME APIEverywhereyoulook' 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • [email protected] www.teledyne-api.com