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Mini ODS

Product catalog summary

Overview: The Mini ODS is a compact, high-purity ozone delivery system designed for semiconductor applications. It is capable of producing ozone concentrations over 21% w/w and is suitable for various wafer processing applications such as Chemical Vapor Deposition (CVD), Atomic Layer Deposition (ALD), oxide growth, surface conditioning, particle cleaning, photoresist removal, and ashing.

Key Features:

Compact design suitable for 19” rack mount or tabletop use.
Produces ozone concentrations over 21% w/w (320g/Nm3).
Low cost of ownership with no consumables required.
Fully integrated with a high purity ozone generator, high concentration ozone analyzer, closed loop servo controller, oxygen and nitrogen mass flow controllers (MFC), back pressure regulator, and electro-pneumatic divert valve.
Expandable to support additional ozone generators for independent processes.
Interfacing capability with dissolved ozone analyzers and safety interlocks with ozone leak detectors.

Specifications:

Ozone concentration: Over 320 g/Nm3 or 21.0% w/w.
Ozone flow rate: Optimized for 1 slpm, with other flow rates available.
Ozone outlet pressure: 15 to 40 PSIG, typically set at 30 PSIG.
Ambient temperature: 5-35°C.
Feed gas requirements: Oxygen Grade 6 or better, Nitrogen Grade 5 or better (for doping).
Cooling water temperature: 17 to 20°C, flow rate configuration dependent.
Setpoint controller: Automatic servo loop control with user programmable setpoints for generator power, gas flow rate, and O3 concentration.
Analyzers: UV O3 gas concentration, with optional UV O3 dissolved concentration.
Gas flow controllers: MFC for O2 and N2 included.
Display: 2 line x 40 character, VFD.
Analog I/O: 1x Analog Output, 0-5VDC; 1x Analog Input, 0-5VDC.
Digital I/O: RS-232C, bi-directional; 2x Digital Inputs; 2x Digital Outputs.
Power: 208 to 240 VAC, 1θ or 3θ.
Dimensions: 19” x 13.7” x 18” (w x h x d).
Compliance: CE.
Warranty: 1 year.

System Options:

Ozone Destruct.
Dissolved Ozone Analyzer.
Ozone Safety Analyzer.
Expandable to control additional ozone generators.

Contact Information: Teledyne API, 9970 Carroll Canyon Road, San Diego, CA 92131, USA. Tel: 858-657-9800, Email: [email protected], Website: www.teledyne-api.com

Catalog excerpts

MODEL MINI ODS Compact High-Purity Ozone Deliuery System - Ideal for semiconductor applications - □ STANDBY □ REMOTE □ OVER VOLTAGE Features ■ Compact design ■ Produces O3 Concentrations over 21% w/w ■ 19” rack mountable or table top ■ Low cost of ownership / no consumables ■ Fully integrated solution including: - High Purity Ozone Generator - High Concentration Ozone Analyzer - Closed Loop Servo Controller - Oxygen MFC - Nitrogen MFC - Back Pressure Regulator - Electro-pneumatic divert valve The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics. The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. The Mini ODS can also interface to a dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API's multichannel ozone leak detectors and ozone destruct sub-systems. Applications ■ Chemical Vapor Deposition (CVD) ■ Atomic layer Deposition (ALD) ■ Oxide growth ■ Surface conditioning ■ Particle cleaning ■ Photoresist removal ■ Ashing

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System Options_ ■ Ozone Destruct ■ Dissolved Ozone Analyzer ■ Ozone Saftey Analyzer ■ expandable to control addtional Ozone Generators — OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000104A (DCN 7917) 08.02.18 TELEDYNE API Eve ry wh e rey o u I oo k' 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • [email protected] www.teledyne-api.com

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