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Mini ODS

Mini ODS
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MODEL MINI ODS Compact High-Purity Ozone Deliuery System - Ideal for semiconductor applications - □ STANDBY □ REMOTE □ OVER VOLTAGE Features ■ Compact design ■ Produces O3 Concentrations over 21% w/w ■ 19” rack mountable or table top ■ Low cost of ownership / no consumables ■ Fully integrated solution including: - High Purity Ozone Generator - High Concentration Ozone Analyzer - Closed Loop Servo Controller - Oxygen MFC - Nitrogen MFC - Back Pressure Regulator - Electro-pneumatic divert valve The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics. The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. The Mini ODS can also interface to a dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API's multichannel ozone leak detectors and ozone destruct sub-systems. Applications ■ Chemical Vapor Deposition (CVD) ■ Atomic layer Deposition (ALD) ■ Oxide growth ■ Surface conditioning ■ Particle cleaning ■ Photoresist removal ■ Ashing

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System Options_ ■ Ozone Destruct ■ Dissolved Ozone Analyzer ■ Ozone Saftey Analyzer ■ expandable to control addtional Ozone Generators — OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000104A (DCN 7917) 08.02.18 TELEDYNE API Eve ry wh e rey o u I oo k' 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • api-sales@teledyne.com www.teledyne-api.com

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