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CAT-O3 Series

CAT-O3 Series
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CAT-O3,_ SERiES Catalytic Ozone DestructsIdeal for semiconductor applications - Features ■ All welded construction ■ Self contained ■ Rapid reaction time ■ No consumables The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen. Applications ■ CVD TEOS/Ozone ■ ALD ■ MOCVD ■ Ashers ■ No maintenance ■ Simple installation The CAT-O3 series of ozone destructs are made from a welded stainless steel enclosure protected with a heat shield. They are carefully designed to meet the industry's stringent safety performance requirements. ■ Wet Benches ■ Spray Tools & more

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Specifications Model — OZONE INSTRUMENTATION FOR EVERY APPLICATION — Specifications subject to change without notice. All specifications are based on constant conditions. Printed documents are uncontrolled. SAL000100A (DCN 7917) 08.02.18 TELEDYNE API Everywhereyoulook" 9970 Carroll Canyon Road, San Diego, CA 92131 • USA Tel. 858-657-9800 • api-sales@teledyne.com www.teledyne-api.com

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