Introduction
Teledyne Analytical Instruments (TAI) addresses the critical need for monitoring oxygen contamination in semiconductor manufacturing processes. Oxygen contamination can significantly affect product yields, necessitating precise monitoring at parts-per-billion (ppb) levels in ultra-high purity (UHP) gases.

Product Overview
TAI introduces the Bi-potentiostat Driven Sensor (BDS), a high-sensitivity oxygen sensor designed for semiconductor applications. The BDS offers a lower detection limit (LDL) of 500 ppt, rapid response, and ease of use, surpassing previous wet-cell oxygen sensors.

Theory of Operation
The BDS is a four-electrode, non-depleting electrochemical cell driven by a bi-potentiostat circuit. It includes a sensing electrode for oxygen detection, a protective electrode to remove dissolved oxygen, a reference electrode for potential control, and a counter electrode for current path.

Design and Features
The BDS design ensures precise control of electrode potentials, fast recovery from air exposure, and operation in open-air conditions. It is suitable for environments with limited acid gases. The sensor is non-depleting, with a two-year warranty and an expected life of three to five years.

Specifications
- User-programmable ranges: 0-50 ppb, 0-1000 ppb, 0-10 ppm
- Accuracy: ±2% at constant temperature, ±5% over full range
- Operating temperature: 5 to 40°C
- Response time: 90% in less than 60 seconds
- Outputs: 4-20 mADC, 0-1 VDC, RS-232C interface
- Power: 100-240 VAC, 50/60 Hz

Additional Features
- Auto-calibration software
- Self-diagnostics and system failure alarms
- Integral sample pump for low-pressure applications
- Leak-free integrity with helium leak checks

Analyzer Interface
The BDS is available in two configurations: BDS-3000 and BDS-306. The BDS-3000 is compact and cost-effective for ppb oxygen detection, while the BDS-306 is designed for easy replacement of existing analyzers.

Conclusion
Teledyne's BDS series offers advanced oxygen monitoring solutions for semiconductor manufacturing, ensuring high accuracy and reliability in detecting oxygen contamination at ppb levels.