1. Catalogs
  2. Tecnotion
  3. Vacuum conditions in semiconductor applications

Vacuum conditions in semiconductor applications
1 /2Pages

Vacuum conditions in semiconductor applications

Vacuum conditions in semiconductor applications
1 /2Pages

Catalog excerpts

Vacuum conditions in semiconductor applications-1

Direct drive motors in vacuum environments Vacuum conditions in semiconductor applications Many applications in the semiconductor industry operate in vacuum environments. These applications often require vacuum conditions to prevent contamination and improve the precision controls. This presents specific challenges for motor design and operation, which can be overcome with ironless vacuum motors. Ironless vacuum motors not only fulfill the requirements of vacuum conditions but also uphold the required performance standards. The fully enclosed design of our Generation 2 vacuum motors is optimized for low heat dissipation and optimal mounting. These features allow an easy system design which is suited for integration of multiple motors in one system. Solves challenges in vacuum environments: Outgassing and contamination Precision Maintenance and reliability Heat transfer Installation difficulties Materials compatibility

 Open the catalog to page 1
Vacuum conditions in semiconductor applications-2

Generation 2 vacuum motors Solutions for the semiconductor industry Tecnotion vacuum motors are designed to deliver the desired force and precision while having very low outgassing in vacuum environments. Vacuum chamber evacuation times can be reduced by using vacuum rated motors. Additionally, optimal thermal properties, excellent safety and RGA performance and installation flexibility saves time and equipment costs, increases throughput and reduces rejects. With multiple winding types and coil unit sizes available, the Vacuum Generation 2 Series always offers the right direct drive motor. Vacuum...

 Open the catalog to page 2
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.