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Vacuum conditions in semiconductor applications

Vacuum conditions in semiconductor applications

Vacuum conditions in semiconductor applications

Product catalog summary
Overview
Ironless vacuum motors are designed to meet the demands of vacuum conditions while maintaining high performance standards. The Generation 2 vacuum motors feature a fully enclosed design optimized for low heat dissipation and easy mounting, facilitating the integration of multiple motors within a single system.
Applications in the Semiconductor Industry
These motors are particularly suited for semiconductor applications that require vacuum environments to prevent contamination and enhance precision controls. The design addresses challenges such as outgassing, precision, maintenance, heat transfer, installation, and material compatibility.
Generation 2 Vacuum Motors
The Generation 2 series offers solutions tailored for the semiconductor industry, providing low outgassing and optimal thermal properties. These motors reduce vacuum chamber evacuation times, enhance safety, and offer installation flexibility, which collectively save time and costs while increasing throughput and reducing rejects.
Key Features
  • Fully enclosed design
  • Improved thermal resistance
  • Stainless steel strip for stable installation
  • Enhanced outgassing performance
  • Additional safety with temperature sensors
  • Multiple coil unit sizes and winding options
Customization and Support
The Generation 2 series is prepared for feedthrough instead of lead wires, and Tecnotion offers support for applications with stricter outgassing requirements. For more demanding applications, contact [email protected].
Simulation Tool
The Vacuum G2 motors are integrated into Tecnotion's simulation tool, providing a user-friendly method for motor selection and a comprehensive overview of specifications and performance characteristics. Visit the simulation tool page at tecnotion.com/simulation-tool/.
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Catalog excerpts

Vacuum conditions in semiconductor applications-1

Direct drive motors in vacuum environments Vacuum conditions in semiconductor applications Many applications in the semiconductor industry operate in vacuum environments. These applications often require vacuum conditions to prevent contamination and improve the precision controls. This presents specific challenges for motor design and operation, which can be overcome with ironless vacuum motors. Ironless vacuum motors not only fulfill the requirements of vacuum conditions but also uphold the required performance standards. The fully enclosed design of our Generation 2 vacuum motors is optimized for low heat dissipation and optimal mounting. These features allow an easy system design which is suited for integration of multiple motors in one system. Solves challenges in vacuum environments: Outgassing and contamination Precision Maintenance and reliability Heat transfer Installation difficulties Materials compatibility

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Vacuum conditions in semiconductor applications-2

Generation 2 vacuum motors Solutions for the semiconductor industry Tecnotion vacuum motors are designed to deliver the desired force and precision while having very low outgassing in vacuum environments. Vacuum chamber evacuation times can be reduced by using vacuum rated motors. Additionally, optimal thermal properties, excellent safety and RGA performance and installation flexibility saves time and equipment costs, increases throughput and reduces rejects. With multiple winding types and coil unit sizes available, the Vacuum Generation 2 Series always offers the right direct drive motor. Vacuum...

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