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Resistivity and Conductivity imaging – TF map 2525RM

Resistivity and Conductivity imaging – TF map 2525RM

Resistivity and Conductivity imaging – TF map 2525RM

Product catalog summary
Overview
The EddyCus® TF map 2525RM is a resistivity imaging device designed for efficient, contact-free imaging with high resolution capabilities ranging from 25 to 1,000,000 points. It is engineered and manufactured by SURAGUS GmbH in Germany.

Applications
The device is suitable for various applications including defect imaging, mapping of encapsulated layers, wafer resistivity imaging, ingot and boule resistivity imaging, sputter target composition imaging, purity assessment, electrical discharge machining, material sorting, melting, casting, sintering, and integrity assessment.

Device Series and Materials
The device can measure metal thickness, sheet resistance, emissivity, conductivity/resistivity, electrical anisotropy, weight, drying status, and permeability. It is compatible with materials such as semiconductors (Si, SiC, GaAs, GaN), alloys, metals, graphite, graphene, compounds, and composites.

Device Control and Software
The device features pre-defined measurement and product recipes, line scan, histogram and area analysis, black and colored image coding, CSV and PDF export, SPC summary and export, three user levels, a material database for parameter conversion, edge effect compensation, and data storage and import capabilities.

Technical Specifications
The device uses high frequency eddy current sensor technology and can handle materials like wafers, boules, pucks, plates, and thin films. The maximum scanning area is 10 inches (250 mm x 250 mm), with larger sizes available upon request. Edge effect correction ranges from 2 to 10 mm, and the maximum sample thickness or sensor gap is defined by the thickest sample (3/5/10/25 mm).

Measurement Ranges
Resistivity range accuracy can be optimized within a customer-specified range: 0.002 – 0.1 mOhm cm, 0.1 – 100 mOhm cm, and 100 – 1,000 mOhm cm. Sheet resistance range accuracy is also customizable: Low (0.0001 – 10 Ohm/sq; 2 – 5% accuracy) and Standard (0.001 – 100 Ohm/sq; 2 – 5% accuracy).

Scanning and Measurement
The scanning pitch options are 1/2/5/10 mm, with other options available upon request. The device can perform 100 measurement points in 5 minutes or 10,000 measurement points in the same time frame. Scanning time varies based on the area and pitch, ranging from 0.5 to 15 minutes.

Physical Dimensions
The device dimensions are 23.6" x 9.05" x 31.5" (549 mm x 236 mm x 786(836) mm) and it weighs 27 kg.

Additional Features
Additional features include metal thickness imaging, anisotropy, and sheet resistance sensor capabilities.

Contact Information
For further questions, contact SURAGUS GmbH at +49 351 32 111 520 or visit their website at www.suragus.com.
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Catalog excerpts

Resistivity and Conductivity imaging – TF map 2525RM-1

Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 EddyCus® TF map 2525RM - Resistivity Imaging Device P_T_2525RM_21 Highlights Device Series ► Contact-free imaging ► High resolution imaging (25 to 1,000,000 points) ► Defect imaging ► Mapping of encapsulated layers ► Metal thickness (nm, ^m) ► Sheet resistance (Ohm/sq) ► Emissivity ► Conductivity / resistivity (mOhm cm) ► Electrical anisotropy (%) ► Weight (g/m2) and drying status (%) ► Permeability (H/m) Beta SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further questions: +49 351 32 111 520 Applications ► Wafer resistivity imaging ► Ingot and boule resistivity imaging ► Sputter target composition imaging ► Purity assessment ► Electrical discharge machining ► Material sorting (map: homogeneity assessment) ► Melting, casting, sintering ► Defect imaging and integrity assessment Materials ► Semiconductors ► Si (mono, poly) ► SiC, SiSiC ► GaAs ► GaN ► Alloys ► Metals ► Graphite ► Graphene ► Compounds ► Composites Visit us at: www.suragus.com www.suragus.com/calculator www.suragus.com/EddyCusMap2525 Engineered and Made in Germany jec ^ WINNER 0F2016 INNOVATION AWARD

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Resistivity and Conductivity imaging – TF map 2525RM-2

EddyCus® TF map 2525RM – Resis�vity Imaging Device Measurement technology High frequency eddy current sensor Wafer, boules, pucks, plates, thin film 10 inch / 250 mm x 250 mm (larger upon request) Edge effect correc�on / exclusion 2 – 10 mm (depending on size, range, setup and requirements) Max. sample thickness / sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample) Resis�vity range accuracy can be op�mized within a customer specified range Sheet resistance range accuracy can be op�mized within a customer specified range Scanning pitch 1 / 2 / 5 / 10 mm (other upon request) Measurement...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.