Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 EddyCus® TF map 2525RM - Resistivity Imaging Device P_T_2525RM_21 Highlights Device Series ► Contact-free imaging ► High resolution imaging (25 to 1,000,000 points) ► Defect imaging ► Mapping of encapsulated layers ► Metal thickness (nm, ^m) ► Sheet resistance (Ohm/sq) ► Emissivity ► Conductivity / resistivity (mOhm cm) ► Electrical anisotropy (%) ► Weight (g/m2) and drying status (%) ► Permeability (H/m) Beta SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further questions: +49 351 32 111 520 Applications ► Wafer resistivity imaging ► Ingot and boule resistivity imaging ► Sputter target composition imaging ► Purity assessment ► Electrical discharge machining ► Material sorting (map: homogeneity assessment) ► Melting, casting, sintering ► Defect imaging and integrity assessment Materials ► Semiconductors ► Si (mono, poly) ► SiC, SiSiC ► GaAs ► GaN ► Alloys ► Metals ► Graphite ► Graphene ► Compounds ► Composites Visit us at: www.suragus.com www.suragus.com/calculator www.suragus.com/EddyCusMap2525 Engineered and Made in Germany jec ^ WINNER 0F2016 INNOVATION AWARD

EddyCus® TF map 2525RM – Resis�vity Imaging Device Measurement technology High frequency eddy current sensor Wafer, boules, pucks, plates, thin film 10 inch / 250 mm x 250 mm (larger upon request) Edge effect correc�on / exclusion 2 – 10 mm (depending on size, range, setup and requirements) Max. sample thickness / sensor gap 3 / 5 / 10 / 25 mm (defined by the thickest sample) Resis�vity range accuracy can be op�mized within a customer specified range Sheet resistance range accuracy can be op�mized within a customer specified range Scanning pitch 1 / 2 / 5 / 10 mm (other upon request) Measurement...