EddyCus® TF lab 2020RM – Resis�vity Tester
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Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 EddyCus® TF lab 2020RM - Resistivity Tester P_T_2020RM_21 Highlights Device Series ► Contact-free and realtime ► Accurate single-point measurement ► Manual mapping guided byeasy-to-handle software ► Measurement of encapsulated layers ► Characterization of bulk specimen ► Conductivity / resistivity (mOhm cm) ► Sheet resistance (Ohm/sq) ► Metal layer thickness (nm, |um) ► Metal substrate thickness (|um) ► Emissivity ► Defects and integrity assessment SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further questions: +49 351 32 111 520 Applications ► Wafer resistivity ► Ingot and boule resistivity ► Sputter target composition ► Purity assessment ► Electrical discharge machining ► Material sorting ► Melting, casting, sintering ► Defect imaging and integrity assessment Materials ► Semiconductors ► Si (mono, poly) ► SiC, SiSiC ► GaAs ► GaN ► Alloys ► Metals ► Graphite ► Graphene ► Compounds ► Composites Visit us at: www.suragus.com www.suragus.com/calculator www.suragus.com/EddyCusLab2020 Engineered and Made in Germany jec ^ WINNER 0F2016 INNOVATION AWARD

EddyCus® TF lab 2020RM – Resis�vity Tester Measurement technology High frequency eddy current sensor Si, SiC, alloys, metals, carbon-based materials Substrate area Unrestricted (device open on all sides) Resis�vity measurement accuracy can be op�mized within a customer specified range Sheet resistance range Thickness measurement range of metal films (e.g. copper) 2 nm – 2 mm (in accordance with sheet resistance) Device dimensions (w/h/d) / weight Further available features Sheet resistance measurement Metal thickness monitor Device Control and So�ware Last Updated: May 2021. Conte