EddyCus® TF lab 2020RM – Resis�vity Tester

Product catalog summary

Overview: The EddyCus® TF lab 2020RM is a resistivity tester designed for efficient and accurate testing solutions. It offers contact-free and real-time measurements, suitable for a variety of applications and materials.

Key Features:

Contact-free, real-time measurement capabilities.
Accurate single-point measurement with manual mapping supported by user-friendly software.
Measurement of encapsulated layers and characterization of bulk specimens.
Capability to measure conductivity/resistivity, sheet resistance, metal layer thickness, and emissivity.
Defect and integrity assessment for various materials.

Applications:

Wafer, ingot, and boule resistivity measurement.
Sputter target composition and purity assessment.
Electrical discharge machining, material sorting, melting, casting, and sintering.
Defect imaging and integrity assessment.

Materials: The device is applicable to semiconductors (Si, SiC, GaAs, GaN), alloys, metals, graphite, graphene, compounds, and composites.

Technical Specifications:

Measurement technology: High frequency eddy current sensor.
Materials: Si, SiC, alloys, metals, carbon-based materials.
Substrate area: 8 inch / 204 mm x 204 mm.
Max. sample dimensions: Unrestricted (device open on all sides).
Resistivity measurement accuracy: Optimizable within specified ranges (0.002 – 1,000 mOhm cm).
Sheet resistance range: 0.01 – 100 Ohm/sq.
Thickness measurement range for metal films: 2 nm – 2 mm.
Device dimensions/weight: 11.4” x 5.5” x 17.5” / 10 kg.

Additional Features: Includes sheet resistance measurement and metal thickness monitoring.

Contact Information: SURAGUS GmbH, Maria-Reiche-Strasse 1, 01109 Dresden, Germany. Phone: +49 351 32 111 520. Website: www.suragus.com

Note: Last updated in May 2021. Content is subject to change.

Catalog excerpts

EddyCus® TF lab 2020RM – Resis�vity Tester-1

Efficient Testing Solutions SURACUS®) Sensors & Instruments 1 EddyCus® TF lab 2020RM - Resistivity Tester P_T_2020RM_21 Highlights Device Series ► Contact-free and realtime ► Accurate single-point measurement ► Manual mapping guided byeasy-to-handle software ► Measurement of encapsulated layers ► Characterization of bulk specimen ► Conductivity / resistivity (mOhm cm) ► Sheet resistance (Ohm/sq) ► Metal layer thickness (nm, |um) ► Metal substrate thickness (|um) ► Emissivity ► Defects and integrity assessment SURAGUS GmbH Maria-Reiche-Strasse 1 01109 Dresden Germany For further questions: +49 351 32 111 520 Applications ► Wafer resistivity ► Ingot and boule resistivity ► Sputter target composition ► Purity assessment ► Electrical discharge machining ► Material sorting ► Melting, casting, sintering ► Defect imaging and integrity assessment Materials ► Semiconductors ► Si (mono, poly) ► SiC, SiSiC ► GaAs ► GaN ► Alloys ► Metals ► Graphite ► Graphene ► Compounds ► Composites Visit us at: www.suragus.com www.suragus.com/calculator www.suragus.com/EddyCusLab2020 Engineered and Made in Germany jec ^ WINNER 0F2016 INNOVATION AWARD

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EddyCus® TF lab 2020RM – Resis�vity Tester-2

EddyCus® TF lab 2020RM – Resis�vity Tester Measurement technology High frequency eddy current sensor Si, SiC, alloys, metals, carbon-based materials Substrate area Unrestricted (device open on all sides) Resis�vity measurement accuracy can be op�mized within a customer specified range Sheet resistance range Thickness measurement range of metal films (e.g. copper) 2 nm – 2 mm (in accordance with sheet resistance) Device dimensions (w/h/d) / weight Further available features Sheet resistance measurement Metal thickness monitor Device Control and So�ware Last Updated: May 2021. Conte

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