Precision Stages and Systems for Vacuum
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Steinmeyer Mechatronik GmbH Precision Stages and Systems for Vacuum

Steinmeyer The Steinmeyer Group  Three Competence Centers. Worldwide over 650 employees.  High-precision ball screws for industrial applications and aerospace  High-precision positioning solutions  High-precision metrology Steinmeyer Mechatronik GmbH  Competence center for positioning solutions and mechatronic systems  100 highly motivated and special skilled employees in Dresden  Over 140 years experience in mechanical design and production  Innovative designs for a variety of applications  Three shift operation in production Steinmeyer Mechatronik | www.steinmey

What are we offering?  Stages, Assemblies, Systems Catalogue Stages, Custom Designs  OEM Design and Manufacturing We design, manufacture and test mechatronic assemblies for a wide variety of applications.  All-in-one Process We carry out the whole design and production process under one roof in our factory in Dresden, Germany. Steinmeyer Mechatronik | www.steinmeyer-mechatronik

Assembly and test in our Clean Room Vacuum Systems and Stages Steinmeyer Mechatronik | www.steinmeyer-mechatronik.de

Vacuum Linear Stages

Application: scanning of samples Benefit: fast positioning in UHV, also vertically Features: positioning with extreme resolution, very slim, with internal motor, magnet free • • • • Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic / low magnetic / magnet free Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Technical Data • Stroke: 40mm • Repeatability: ± 0,4µm • Load: 2kg horizontally, 1kg vertically • Velocity: 100mm/s Components • Motor: Nanomotion • Feedback: Linear 5nm...100nm • Guide: Cross Roller Stainless...

Application: fast transport stage Benefit: high life time despite dry lube Features: dry lube ball screw drive • • • • Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Technical Data • Stroke: 100mm, 200mm, 500mm • Repeatability: ± 4µm SM, +-10µm dry SM open loop • with Feedback ± 0,5µm • Load: 5kg horizontally, 1kg vertically • Velocity: 50mm/s Components • Motor: Stepper Motor, Ball Screw, (Lead Screw) • Feedback: Linear 100nm • Guide: Stainless Steel Hybrid...

Application: transport stage, scanning stage Benefit: high life time despite dry lube Features: lead screw with dry lube or ball screw with liquid lube • • • • Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Version with Gear Box Technical Data • Stroke: 5mm, 10mm, 40mm, 80mm • Repeatability: ± 4µm SM, with Feedback ± 0,5µm • Load: 4,5kg horizontally or vertically • Velocity: 5mm/s Components • Stepper Motor, (Ball Screw), Lead Screw • Feedback: Open Loop or Linear...

Application: transport stage, scanning stage for high loads Benefit: high life time despite dry lube Features: lead screw with dry lube or ball screw with liquid lube • • • • Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Technical Data • Stroke: 5mm, 10mm, 40mm, 80mm • Repeatability: ± 4µm SM, with Feedback ± 0,5µm • Load: 20kg horizontally or vertically • Velocity: 5mm/s Components • Motor: Stepper Motor, (Ball Screw), Lead Screw • Feedback: Open Loop or Linear...

Application: transport stage, scanning stage for high loads Benefit: high life time despite dry lube Features: lead screw with dry lube or, ball screw with liquid piezo brakes for nm-stability • • • • Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Technical Data • Stroke: 10mm, 50mm, 100mm Version with Gear Box • Repeatability: ± 4µm SM, with Feedback ± 0,5µm • Load: 10kg horizontally, 2kg vertically • Velocity: 5mm/s Components • Stepper Motor, (Ball Screw), Lead...

Application: scanning of samples Benefit: Nanometer-positioning, also vertically Features: positioning with extreme resolution and highest stiffnes Can be equipped with 2 (or 4) motors. • • • • Vacuum: all pressure ranges HV / UHV down to 10−11 mbar Magnetism: magnetic / low magnetic / magnet free Lubrication: liquid down to 10−8 mbar / dry lube down to 10−11 mbar max. bake-out temperature: 120°C Technical Data • Stroke: 100mm, 200mm, 300mm • Repeatability: ± 20nm • Load: 4kg, 7kg, 10kg horizontally, 2kg ,4kg, 6kg vertically • Velocity: 5mm/s Components • Motor: Piezo Motor • Feedback:...

Steinmeyer Mechatronik | www.steinmeyer-mechatronik.de

Vacuum Micro Stages

Application: multi purpose micro stage Benefit: for high resolution scanning Features: positioning with very high resolution Vacuum: all pressure ranges HV / UHV down to 10−11mbar Magnetism: magnetic / low magnetic / magnet free Lubrication: liquid down to 10−8mbar / dry lube down to 10−11mbar max. bake-out temperature: 120°C Technical Data • Stroke: 10mm • Repeatability: ± 0,1µm • Load: 0,9kg horizontally, 0,2kg vertically • Velocity: 5mm/s Components • Motor: Piezo Motor • Feedback: Linear 5nm...100nm • Guide: Cross Roller Stainless Steel, Hybrid, optionally Ceramics • Controller: Galil