UGA100/200/300 and ULT100/200/300 — 100 amu, 200 amu, and 300 amu systems
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UGA100/200/300 and ULT100/200/300 — 100 amu, 200 amu, and 300 amu systems - 1

• Atmospheric pressure to UHV • 100,200 and 300 amu systems • Fast response time (<0.2 s) • Electron multiplier std. on all systems • Stand-alone leak detection • Built-in heaters for bakeout to 120 °C (UGA series) • Windows software (RS-232 or Ethernet) • Multi-capillary inlet (opt., UGA series) • Measure up to 100 % H2 with UGA-Hydrogen (UGA w/ Opt. 03) • Low cost solutions (ULT Series) The UGA and UGA LT Series Universal Gas Analyzers are state-of-the-art bench top mass spectrometers that operate from above atmospheric pressure to UHV. They are ideal for on-line monitoring and analysis of gas mixtures. Whether you’re measuring trace-level contaminants, solvents, hydrocarbons, refrigerants or corrosive gases, your UGA analyzer is up to the task. UGA applications include semiconductor exhaust gas monitoring, glove box analysis, fuel cell studies, Freon detection, pollution monitoring, fermentation studies and general R&D vacuum analysis. These analyzers are also simple to operate and maintain. The chassis design allows the instrument to be operated vertically or horizontally, and both front-panel and computer operation are supported. The UGA LT series is a simplified design for less demanding applications. Principle of Operation The UGA system uses a two-stage pressure reducing inlet to sample gases at atmospheric pressure. After the pressure is reduced to around 10-6 Torr, the gas stream is sent to a mass spectrometer (residual gas analyzer — RGA) which measures the concentration of each mass of interest. The UGA Windows software provides a graphical user interface for complex graphing and data analysis. The software also allows remote control of the system’s valves, heaters and pumps. SRS Stanford Research System

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UGA100/200/300 and ULT100/200/300 — 100 amu, 200 amu, and 300 amu systems - 2

For gas sampling in the range of 10–1 to 10–4 Torr, the vacuum inlet assembly is used. Simply attach a 2.75" CF to 1/4" tube adapter to one of the CF ports, and adjust the length of the tube for the inlet pressure. Direct access to the RGA is provided for UHV applications (<10–4 Torr). Any of the 2.75" CF ports of the vacuum inlet assembly can be used to connect to your vacuum chamber. Turbo Pump Venting (UGA series & UGA LT series) An optional valve and inlet to the turbo pump’s exhaust is available for users who wish to vent with dry nitrogen (or other inert gases). This keeps the pump...

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UGA100/200/300 and ULT100/200/300 — 100 amu, 200 amu, and 300 amu systems - 3

Flow rate Pressure Stainless Steel & PEEK capillaries, two extra 2.75" CF ports. 1 to 10 milliliters per minute (at atmospheric pressure) About 10-4 mbar to several bar (depending on connecting ports and capillary) Mass Spectrometer Type Detector Mass range Resolution Detection limit Operating pressure Quadrupole (RGA) Faraday cup & electron multiplier 100, 200 or 300 amu Better than 0.5 amu (at 10 % of peak height) Less than 1 ppm 5 x 10-6 Torr Connections* (UGA series) Sample inlet 1 mbar to 1 bar 10-1 to 10-4 Torr <10-4 Torr Computer interface V" Ultra-Torr® fitting 2.75" CF port 2.75"...

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