Residual Gas Analyzers RGA100/200/300 — 100 amu, 200 amu and 300 amu systems SRS Residual Gas Analyzers · 100, 200 and 300 amu systems · Better than 1 amu resolution · 6 decades of dynamic range · 5 × 10−14 Torr detection limit · RGA Windows & LabVIEW software · Field-replaceable electron multiplier and filament · RS-232 and Ethernet interfaces The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGAs provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows ­oftware package that is used for data s acquisition and analysis, as well as probe control. Rugged Probe Design The probe consists of an ionizer, quadrupole mass filter, and a detector. The simple design has a small number of parts which minimizes outgassing and reduces the chances of introducing impurities into your vacuum system. The probe assembly is rugged and mounts onto a standard 2.75" Conflat® flange. It is enclosed within a stainless steel tube, with the exception of the ionizer which requires just 2.5" of clearance in your ­ vacuum system — about that of a standard ion gauge. The probe is designed using self-aligning parts so it can easily be reassembled after cleaning. Compact Electronics Control Unit The densely packed ECU contains all the necessary electronics for controlling the RGA head. It is powered by either an external +24 VDC (2.5 A) power supply or an optional, built-in power module which plugs into an AC outlet. LED indicators provide instant feedback on the status of the electron multiplier, filament, electronics system and the Stanford Research Systems phone: (408)744-9040 www.thinkSRS.com

probe. The ECU can easily be removed from the probe for high-­temperature bakeouts. Unique Filament Design A long-life, dual thoriated-iridium (ThO2/Ir) filament is used for electron emission. Dual ThO2/Ir filaments last much longer than single filaments, ­ aximizing the time between m channel, continuous-dynode electron multiplier (EM) offers increased longevity and stability, and can also be replaced by the user — a first for RGAs. Useful Features SRS RGAs have a built-in degassing feature. Using electron impact desorption, the ion source is thoroughly cleaned, greatly reducing the ionizer’s...

The software also allows complete RGA head control with easy mass scale tuning, sensitivity calibration, ionizer setup, and electron-multiplier gain adjustment. For further analysis, data files can be saved in ASCII format for easy transfer into spreadsheets. Graphic images can be saved as META files or copied to the clipboard for importing directly into other Windows programs. The software also provides password protection for locking out head parameters so that casual users can't alter important settings. A Lab VIEW driver is also An optional stand-alone monitor (PPM100) can be used to control...

Analog mode provides a line graph representation of the acquired mass spectrum (partial pressure vs. mass number). Span, resolution and noise floor can each be set. Scans can be single-shot, timed or taken continuously. Pressure vs. time presents a strip chart of partial pressures for selected masses, and provides a complete time history of your data. Complete scrolling and zoom control is available even while data is being acquired. This mode is most often used for monitoring process trends. Library mode contains a comprehensive list of gases that can be used to compare against the current spectrum....

Mass range RGA100 1 to 100 amu RGA200 1 to 200 amu RGA300 1 to 300 amu Mass filter type Quadrupole Detector type Faraday cup (FC), standard Electron multiplier (EM), optional Resolution Better than 0.5 amu @ 10 % peak (per AVS std. 2.3) height. Adjustable to constant peak width throughout the mass range. Sensitivity (A/Torr) 2 × 10–4 (FC), <200 (EM). User adjustable throughout high voltage range. Measured with N2 @ 28 amu with 1 amu full peak width, 10 % height, 70 eV electron energy, 12 eV ion energy, and 1 mA electron emission current. Minimum detectable 5 × 10–11 Torr (FC), partial pressure...