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Residual Gas Analyzers

Residual Gas Analyzers

Residual Gas Analyzers

Product catalog summary
Overview: The RGA100, RGA200, and RGA300 are residual gas analyzers (RGAs) designed by Stanford Research Systems for detailed gas analysis in vacuum systems. They offer mass ranges of 100, 200, and 300 amu respectively, with a resolution better than 1 amu and a detection limit of 5 × 10−14 Torr.
Specifications: These RGAs feature a quadrupole mass filter, a Faraday cup detector, and an optional electron multiplier for enhanced sensitivity. The systems are equipped with a rugged probe design, compact electronics control unit (ECU), and a dual thoriated-iridium filament for long life. The ECU can be powered by an external 24 VDC supply or an optional AC power module.
Software and Interface: The RGAs are supported by Windows software and a LabVIEW driver, allowing for real-time data acquisition and analysis. The software provides features such as analog and histogram scans, leak detection, and programmable alarms. Communication is facilitated via an RS-232 interface.
Features: Key features include a continuous dynode electron multiplier, built-in degassing, filament protection, and a temperature-compensated electrometer. The systems support multi-head operation, allowing up to eight RGAs to be monitored simultaneously.
Applications: These analyzers are suitable for gas analysis, leak detection, and vacuum processing. They offer a cost-effective solution with prices ranging from $3750 to $6000, depending on the model.
Ordering Information: Additional options include an electron multiplier, AC power module, ion counting output, and replacement parts such as filaments and ionizers. An optional stand-alone monitor (PPM100) is also available.
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Catalog excerpts

Residual Gas Analyzers-1

Rugged Probe Design > The 100, 200 and 300 amu residual gas analyzers from SRSoffer exceptional performance and value. These RGAs provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGAsystem comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control. The probe consists of an ionizer, quadrupole mass filter, and adetector. The simple design has a small number of parts which minimizes outgassing and reduces the chances of introducing impurities into your vacuum system. The probe assembly is rugged and mounts onto a standard 2.75 > " of clearance in your vacuumsystem >  flange. It isenclosed within a stainless steel tube, with the exception of the ionizer which requires just 2.5  about that of a standard ion gauge. The probe isdesigned using self-aligning parts so it can easily be reassembled after cleaning. Compact Electronics Control Unit The densely packed ECU contains all the necessaryelectronics for controlling the RGAhead. It is powered by either an external +24 VDC (2.5 A) power supply or an optional, built-in power module which plugs into an AC outlet. LED indicators provide instant feedback on the status of the electron multiplier, filament, electronics system and the > (U.S. list)

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Residual Gas Analyzers-2

probe. The ECU can easily be removed from the probe forhigh-temperature bakeouts. multi-channel, continuous-dynode electron multiplier (EM)offers increased longevity and stability, and can also be replaced by the user SRS RGAs have a built-in degassing feature. Using electronimpact desorption, the ion source is thoroughly cleaned, greatly reducing the ionizers contribution to background noise. Afirmware driven filament protection feature constantlymonitors (675 Hz) for over pressure. If over pressure is detected, the filament is immediately shut off, preserving its life.Aunique temperature-compensated,...

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Residual Gas Analyzers-3

The software also allows complete RGAhead control witheasy mass scale tuning, sensitivity calibration, ionizer setup, and electron-multiplier gain adjustment. For further analysis, data files can be saved in ASCII format for easy transfer into spreadsheets. Graphic images can be saved as METAfiles or copied to the clipboard for importing directly into other Windows programs. The software also provides password protection for locking out head parameters so that casual users cant alter important settings. ALabVIEWdriver is also available on the SRS website.An optional stand-alone monitor (PPM100)...

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Residual Gas Analyzers-4

Analog mode provides a line graphrepresentation of the acquired mass spectrum (partial pressure vs. mass number). Span, resolution and noise floor can each be set. Scans can be single-shot, timed or taken continuously. Pressure vs. time presents a strip chart ofpartial pressures for selected masses and provides a complete time history of your data. Complete scrolling and zoom control is available even while data is being acquired. This mode is most often used formonitoring process trends. Library mode contains a comprehensivelist of gases that can be used to compare against the current spectrum....

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.