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CIS Closed Ion Source Gas Analyzers

CIS Closed Ion Source Gas Analyzers
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Closed Ion Source Gas Analyzers CIS100/200/300 — 100, 200 and 300 amu systems CIS Series Closed Ion Source Gas Analyzers · 100, 200 and 300 amu systems · 1 ppm detection · 10 mTorr max. operating pressure · 1 × 10−12 Torr detection limit · RGA Windows software With better than 1 ppm detection limit, direct sampling at mTorr pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. On-line process monitoring and control, verification of process gas purity at the point of use, high-vacuum residual gas analysis, and process equipment leak checking are some of the areas where these systems will prove indispensable. Compact Design · RGA and CIS mode The probe consists of a quadrupole mass spectrometer with a CIS ionizer mounted inside a 2.75" Conflat® Tee. The control unit mounts directly on the probe’s feedthrough flange and contains all the necessary electronics for operating the instrument. The side port of the CIS nipple provides a connection for the differential pumping system that keeps the quadrupole, filament and detector at high vacuum. The system can be connected directly to a process chamber through its standard CIS mounting flange (2.75” CF). All parts in the unit are self-aligning making servicing easy. You can clean and reassemble the probe, and replace the filament and electron multiplier in the field, without ever calling the factory. · CIS100/1 ... $7250 (U.S. list) Gold Plated Ionizer · CIS200/1 ... $8250 (U.S. list) The entire ionizer is made of gold-plated stainless steel. This reduces outgassing and background signals in the ionization region, improves long-term stability, and permits operation · Field-replaceable electron multiplier and filament · CIS300/1 ... $9750 (U.S. list) Stanford Research Systems phone: (408)744-9040 www.thinkSRS.com

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CIS 100/200/300 Closed Ion Source Gas Analyzers while exposed to reactive and corrosive gases. A tungsten filament is used, which resists corrosive and reactive gases CIS gold plated ionizer like WF6 and silane, and leads to extended lifetime. The closed (gas tight) design of the ionizer prevents commonly interfering species from backstreaming into the ionization volume. This produces peaks free of spectral overlap. The CIS series analyzers come standard with both a Faraday cup detector (10 ppm detection) and a continuous dynode electron multiplier (1 ppm detection). The software allows you...

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CIS100/200/300 Closed Ion Source Gas Analyzers in ASCII format for easy transfer into spreadsheets. Graphic images can be saved as META files or copied to the clipboard pressure of less than 10–9 Torr. The connection port is a 2.75" CF flange. Option O100TDP provides a turbo pump which mounts directly to the CIS head along with a diaphragm roughing pump. When this option is ordered, the entire analyzer is assembled, tested, and calibrated at the factory. Users can provide their own pumping station; however, it is the user’s responsibility to ensure that the pumping system does not damage...

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CIS100/200/300 Specifications RS-232 Busy, Error, Overpressure, Burnt Filament Warm-up time Peak height ±2 % after 3 minutes. Mass stability ±0.1 amu after 30 minutes. Computer interface RS-232C, 28,800 baud with high- level command set Software Windows based application Power 24 VDC @ 2.5 amps. Male DB9 connector, optional built-in power module for AC line operation Weight 6 lbs. Warranty One year parts and labor on defects in materials and workmanship Operational Mass range CIS100/1 CIS200/1 CIS300/1 Mass filter type Detector type Resolution (per AVS std. 2.3) Operating temperature...

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