Specifications • SPECTROLAB-components guarantee maximum quality by using high grade materials and a quality assurance program acc. to ISO 9001. • All parts in the gas wetted surface area are cleaned in an ultrasonic cleaning system (CFCfree) with the special Cleaning process ® SPECTRO-CLEAN and then baked out. • SPECTROLAB-components undergo a 100% function- and Helium-leak-test. Product features • Brass (chrome plated) cylinder pressure regulator • Extremly stable outlet pressure by applied extremly accurate Technology "exact" and anti- vibration device • For non-corrosive gases and gas mixtures up to quality 6.0 • 6 ports for flexible and individual configuration • Suitable for inlet pressures up to 300 bar • Max. outlet pressures 1.5 up to 20 bar • Light weight • Compact design • Metal-to-metal seal to atmosphere • Suitable for ECD-applications • Pressure regulator can be evacuated • Central filter • Approved for use with oxygen • Simple outlet pressure limitation by handwheel • Easy to install • New laboratory-style design • Ergonomically designed Technical data Type single-stage EXACT Inlet pressure P1 max. 300 bar Outlet pressure P2 1.5 / 4 / 10 / 20 bar Materials Body regulator, relief valve: chrome plated brass Valve seat: Hytrel (P1 > 50 bar: PA) Diaphragm: Hastelloy C276 Soft goods: EPDM Filter: Sintered SS 316L In- and outlets 1/4” NPT-F o o Temperature range -30 C to +60 C -8 Leak rate (to atmosphere) 1x10 mbar I/s He -6 (via seat) 1x10 mbar I/s He Pressure gauge Safety pressure gauges ISO5171/Kl1.6/NG50 Flow capacitiy CV=0.15 Weight 1.2 kg exact = extremly accurate technology 134 Data sheet DES FM52 Edition 0513 Subject to alteration without prior notice © Spectron Gas Control Systems GmbH Spectron Gas Control Systems GmbH Fritz-Klatte-Str. 8, D-65933 Frankfurt Tel.: +49 (0)69 38016-0, Fax: +49 (0)69 38016-200 [email protected] www.spectron.de

Cylinder regulator FM52exact In- / outlets Ordering information: exact Cylinder regulator FM52 CM 1/4 - 1/8” / 1/4” / 1/2” - OD compression fitting (brass) CM 6 - 3 / 6 / 8 / 10 / 12 mm compression fitting (brass) CE 1/4 - 1/8” / 1/4” / ½” - OD compression fitting (stainless steel) CE 6 - 3 / 6 / 8 / 10 / 12 mm compression fitting (stainless steel) B - plug A - relief valve - 1/4”-NPT-F xxxx - detailed specification of cylinder connection including the relevant standard and number (e.g. BS no.3 for nitrogen up to 230 bar) K - contact gauge M - pressure gauge 3 2 0 - 1/4”-NPT-F (port only) Please...