Cylinder pressure regulator FE51-SP Specifications • SPECTROCEM-components guarantee maximum quality by using high grade materials and a quality assurance program acc. to ISO 9001. • All parts in the gas wetted surface area are cleaned in an ultrasonic cleaning system (CFC-free) with the special Cleaning process SPECTRO-CLEAN® and then baked out. • SPECTROCEM-components undergo a 100% function- and Helium-leak-test. Product features • Stainless steel cylinder pressure regulator with purge valves for process gas or purge gas purging • Pressure regulator with very stable outlet pressure and anti-vibration device • For corrosive, toxic gases and gas mixtures with corrosive components up to quality 6.0 • Purge valves in 3 different configurations available • Suitable for inlet pressures up to 200 bar • Max. outlet pressures 1.5 up to 200 bar * • Metal-to-metal seal to atmosphere • Suitable for ECD-applications • Pressure regulator can be evacuated • Inlet filter • Approved for use with oxygen • Simple outlet pressure limitation by handwheel • Easy to install • New laboratory-style design * 1.5 / 4 bar only for inlet pressure ≤ 50 bar Data sheet DES FE51-SP Edition 0115 Subject to alteration without prior notice ©Spectron Gas Control Systems GmbH Technical data Type Materials Body regulator, relief valve: Valve seat: Diaphragm: Filter: SS 316L (SS 1.4404) PVDF Hastelloy C276 Edelstahl 1.4404 Temperature range Leak rate (to atmosphere) 10-8 mbar l/s He (via seat) 10-6 mbar l/s He Pressure gauge Safety pressure gauges ISO5171/Kl1.6/NG50 Flow capacity Side view

Cylinder pressure regulator FE51-SP Ordering information: Cylinder pressure regulator FE51-SP 2 purge valves in the outlet: waste gas + process gas Please specify type of gas (for selection of valve seat materials) 2 purge valves: purge gas in the inlet process gas in the outlet Cylinder connection Detailed specification of cylinder connection including the relevant standard and number (e.g. BS no.3) 3 purge valves: purge gas in the inlet waste gas in the outlet process gas in the outlet Data sheet DES FE51-SP Edition 0115 Subject to alteration without prior notice ©Spectron Gas Control Systems...