Ultrasonic Sensors for the Semiconductor Industry
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Semiconductor Industry Non-Invasive Fluid Monitoring

SEMIFLOW® CO.65 | Non-Contact Flow Meter For Highly Accurate Flow Measurement on Rigid Plastic Tubes & Pipes Reliable liquid flow measurement plays an important role in semiconductor process management. SEMIFLOW CO.65 flow meters can effectively monitor wet processes to ensure a constant flow of the liquid or manage volume dispensing at the points of use. By implementing an accurate and reliable flow measurement, fabs can significantly improve their process quality. The SEMIFLOW sensors are industry-proven cutting-edge flow meters that combine the need for a robust design with an innovative...

SEMIFLOW® CO.66 | Flow Meter for Hazardous Areas For Use in Zone 1 Areas According to ATEX / IECEx Specifically developed for the use in hazardous environments, the SEMIFLOW Ex1 Set opens a new product category for non-contact liquid flow measurement on rigid plastic tubing. It consists of the intrinsically safe SEMIFLOW CO.66 PI Ex1 flow sensor and the control gear Barrier Box ST Ex1. ATEX / IECEx Certifications → Protected against explosion hazard by gas, vapors, or fogs acc. to gas group IIB → Device protection level (EPL) “Gb” for use in Zone 1 acc. to ATEX / IECEx SONOFLOW® IL.52 |...

SONOCHECK® ABD06 | Non-Contact Air Bubble Detector The non-contact air bubble detectors SONOCHECK ABD06 can spot bubbles down to 1 μl and can also be used as full / empty detectors. In critical processes of wafer manufacturing the presence of air bubbles or empty lines can lead to extensive consequences. Thus, their timely detection is crucial to save resources and increase yield. Unique Product Benefits → High grade sensors for air bubble monitoring and full / empty detection → Compact design with integrated electronics for data processing → Clamp-on mechanism for measurement directly...

Non-Contact Flow Meters & Bubble Detectors for the Semiconductor Industry The semiconductor industry is characterized by a number of processes in which different abrasive, adherent, corrosive, and ultra-pure liquids are used. To assure the stability and high quality of these processes, a constant flow measurement as well as the precise and early detection of air bubbles or empty lines are of utmost importance. Fields of Application: → Chemical supply / delivery (CCSS / CDS) → Chemical mechanical planarization / polishing (CMP) → Lithography → Plating → Resist coating → Slurry blending /...

Accessories C3 Software | Configure, Control, Collect → Configure and calibrate sensors for different applications onsite → Control sensor performance and outputs → Collect measurement and sensor data → Monitor real-time flow and totalize volume Portable USB Data Converter → Easy and mobile power supply of SEMIFLOW and SONOFLOW flow meters → Direct transfer of measurement data → Convenient connection of flow meters to a PC via USB Remote Display → asy temporary and permanent flow monitoring E of SEMIFLOW and SONOFLOW sensor → Clear visualization of sensor parameters (flow, volume, status) →...