SEMIFLOW® CO.65 Non-Contact Clamp-On Flow Meters SEMIFLOW clamp-on flow meters are specifically designed for the semiconductor industry. The highly precise and robust ultrasonic sensors measure directly through the rigid plastic tube or pipe without contact to the liquid, eliminating risks of leakages and contaminations, thus increasing uptime and maximizing yield. Their compact housing with integrated electronics board is perfectly suited for a convenient system implementation. Contactless flow measurement Compact sensor design Highest chemical resistance Highest accuracy & repeatability Semiconductor Applications → Chemical supply / delivery (CCSS / CDS) → Chemical mechanical polishing / planarization (CMP) → Lithography → Plating → Resist coating → Slurry blending / mixing → Wafer / mask cleaning → Wet etching Intuitive and Easy to Handle 1 Sensor Selection Parameter Setting System Integration

SEMIFLOW® Ex1 Set The SEMIFLOW Ex1 Set enables non-contact liquid flow measurement on rigid plastic tubes and pipes in hazardous environments. The set consists of the intrinsically safe flow sensor SEMIFLOW CO.66 PI Ex1 and the control gear Barrier Box ST Ex1. → Protected against explosion hazard by gases, vapors and fogs according to gas group IIB → Device protection level "Gb" for use in Zone 1 according to ATEX / IECEx Technical Data Measuring Method Ultrasound transit-time technology Measuring Cycle 0 / 4 ... 20 mA, 0 ... 20 kHz, PNP / NPN / Push-Pull, RS-485 Modbus, digital input Operating...