The Ultimate Rack Mount Chiller for Plasma Etch With even more cooling capacity Optimized for Plasma Etch Control • • • • • • Up to 1800 Watts of cooling capacity -10°C to 80°C operating range ±0.05°C repeatability 80% less power consumption than compressor based chillers Improves wafer to wafer repeatability Multiple interfaces for Lam, AMAT

Precise, Reliable Temperature Control Providing up to 1800 Watts of cooling capacity with ±0.05°C stability at constant load, ThermoRack 1801 uses as much as 80% less power than compressor chillers. Built upon the foundation of our ThermoRack 1201 system, this new unit provides 50% more capacity in the same 5U rack space. With only two moving parts and no compressor, this thermoelectric chiller is known for high reliability and long life. The ThermoRack 1801 reduces environmental impacts by consuming less power, using 60% less facility water and not requiring any Freon or other chemical refrigerants....