Energy Efficient Temperature Control for Plasma Etch Solid State COOLING SYSTEMS Itmfkvalun f ■v?iJrwf...Precisely • Up to 5500 Watts of cooling capacity • -10 °C to 80 °C operating range • ± 0.05°C repeatability • ~ 60% less power consumption than compressor-based chillers • Improves wafer to wafer repeatability • Lam, AMAT CHX or TEL Unity interfaces

NIKOLA 3K/5K PUMP OPERATION RANGES Coolant Output Pressure (psig) Note: Pump curves were generated using water/glycol. Operating window will vary with other fluids Precise Reliable Temperature Control Providing up to 5500 Watts of cooling capacity with ± 0.05°C stability at constant load, Nikola 3K/5K provides precise temperature control while using 60% less electrical power. With only two moving parts and no compressor, this thermoelectric-based chiller is known for high reliability and long life. The Nikola 3K/5K reduces environmental impacts by consuming less power, reducing air conditioning...