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Round Magnetron Cathodes
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Round Magnetron Cathodes
Product catalog summary
Specifications:
- Electrical Power: Supports DC, Pulsed DC, and RF.
- Electrical Connection: Type N.
- Operating Temperature: Maximum 150°C.
- Leak Rate (Static): 1.10-9 mbar/l.s.
- Materials: SS316, Magnetic steel, Copper, PEEK, FKM, and magnets.
- Maximum Pressure Differential: 1 bar.
- Cooling Water Static Pressure: 2-3 nominal (6 bar max).
- Adjustable Magnet Number: Allows magnetic field adjustment.
- Disassembly: Easy to disassemble and clean.
Procedures:
- Special mounting available on demand.
Product Variants:
- Sizes: 2, 3, 4 inches.
- Target Diameter: Ø50.8 mm (2"), Ø76.2 mm (3"), Ø100 mm (4").
- Thickness: 3 or 6 mm.
- Flange Types: KF40, CF40, KF50, CF63.
- Electrical Power Max: 500W (Size 2), 1000W (Size 3), 2000W (Size 4).
- Cooling Tube Diameter: Ø6/Ø4 mm (Size 2), Ø8/Ø6 mm (Sizes 3 and 4).
- Cooling Water Flow Min: 1 l/min (Size 2), 2 l/min (Size 3), 4 l/min (Size 4).
- Weight: Varies from 1.25 kg to 5.2 kg depending on size and flange type.
Contact Information:
- Company: SOCRATE Industrie
- Address: 16 rue des dolines, FR-25500 LE BELIEU
- Website: www.socrate-industrie.com
- Email: [email protected]
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Catalog excerpts
Round magnetron cathodes for sputtering PVD machine • Electrical power: DC, Pulsed DC and RF • Electrical connection: Type N • Leak rate (static): 1.10-9 mbar/l.s • Materials present: SS316, Magnetic steel, Copper, PEEK, FKM and magnets. • Maximum pressure differential: 1 bar • Special mounting on demand * • Static pressure of the cooling water: 2-3 nominal (6 bar max) • Adjustable number of magnet for adjusting the magnetic field • Easy to disassemble and clean SOCRATE Industrie 16 rue des dolines FR-25500 LE BELIEU www.socrate-industrie.com [email protected]
Open the catalog to page 1
SOCRATE Industrie 16 rue des dolines FR-25500 LE BELIEU www.socrate-industrie.com
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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