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Oxides thin films Machines

Oxides thin films Machines

Product catalog summary
Overview: 3D-Oxides and Socrate Industrie have developed the Sybilla line of machines for depositing thin oxide layers. These machines cater to a range of applications from laboratory-scale to mass production, industrial applications, and R&D projects.
Specifications: The Sybilla line supports wafer sizes from Ø150 to Ø450. The machines utilize Chemical Beam Epitaxy (CBE) technology and can incorporate reflectometry and Reflection High-Energy Electron Diffraction (RHEED) for enhanced uniformity on large surfaces.
Materials: The machines can deposit a variety of oxide materials, including TiO2, HfO2, ZrO2, Al2O3, SiO2, ZnO, Ta2O5, VOx, Nb2O5, LiNbO3, and LiTaO3.
Contact Information: For more details, contact 3D-Oxides at [email protected] or Socrate Industrie at [email protected].
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Catalog excerpts

Oxides thin films Machines-1

Oxides thin films Machines 3D-Oxides and Socrate Industrie have developed a comprehensive line of machines designed for the deposition of thin oxide layers. The complete Sybilla line, ranging from Ø150 to Ø450, meets all specific customer needs thanks to a variety of deposition capacities tailored to applications ranging from laboratory-scale to mass production, industrial applications, and R&D projects. These machines use a technology called CBE. They incorporate reflectometry and RHEED, if needed. As a result, uniformity is excellent even on very large surfaces. For more information, please contact 3D-Oxides. 41 Rue Henri Fabre FR-01630 Saint-Genis-Pouilly www.3D-Oxides.com [email protected] Materials currently available: TiO2 (Titania) HfO2 (Hafnia) ZrO2 (Zirconia) Al2O3 (Alumina) SiO2 (Silica) ZnO (Zinc Oxide) Ta2O5 (Tantalum pentoxide) VOx (various Vanadium oxides) Nb2O5 (Niobium pentoxide) LiNbO3 (Lithium Niobate) LiTaO3 (Tantalum Niobate) SOCRATE Industrie 16 rue des dolines FR-25500 LE BELIEU www.socrate-industrie.com [email protected]

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