Heated Gate valve Heated gate valve for chamber separation in cluster machines. • Gate temperature: 150°C max • Electrical power: 300W – 230V - 50Hz • Thermal protection included • Pneumatic jack 2 positions with 2 detectors • Solenoid valve not included • Leak rate: 1.10-9 mbar.l/s • Pressure range: 1.10-6 mbar – 1000 mbar • Materials present: • Gate: SS304 • Seal: FKM • Valve body: 5083 • Maximum pressure differential on the gate: 1bar • Maximum pressure differential at opening: 30mbar • Mounting position: Vertical, pneumatic jack on the top • Access panel for replacing the gasket and the protective sheet metal • Weight: 48kg • Passage Area: 230 x 250 • Other mounting on demand * • Other size on demand * SOCRATE Industrie 16 rue des dolines FR-25500 LE BELIEU www.socrate-

SOCRATE Industrie 16 rue des dolines FR-25500 LE BELIEU www.socrate-industrie.com