High Vacuum Angle Valve Valve type Shaft seal type Single acting Bellows seal Double acting Bellows seal Single acting Double acting O-ring seal Aluminium bodied • Uniform baking temperature • Lightweight, Compact • Minimal outgassing • Minimal contamination from heavy metals • High corrosion resistance to fluorine gas A model with a solenoid valve e has been added. Solenoid valve (Bellows seal type) The bellows assembly can be replaced, which reduces maintenance costs and waste materials. A heat-resistant 2-colour indicator solid state auto switch has been added to the hightemperature type. (Made to order on page 18) Sensor Amplifier Bonnet assembly Bellows assembly

High Vacuum Angle Valve Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. Comparison with a KF25 flange Temperature distribution of the 120 °C specification 140 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Weight Conductance∗1 [kg] [l/s] Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time. Minimal contamination from heavy...

High Vacuum Angle Valve High Vacuum Angle Valve XL-2 Series New Variations Type Valve Shaft seal type type (With solenoid valve) XLFV-2 (With solenoid valve) Solenoid valve Bellows seal Bellows seal Dust free, D Double Bellows a acting seal Dust free, Dust free, O-ring seal O-ring seal O-ring seal cleaned High-speed operation High operating cycles High-speed operation High operating cycles High-speed operation High operating cycles ∗ The XLCV and XLGV series are available as made to order. Please contact SMC for details. High Vacuum Angle Valve Series Variations Type XLA XLAV (With solenoid valve)...

Aluminium High Vacuum Angle Valve Normally Closed, Bellows Seal XLA/XLAV Series e Indicator/Pilot port direction r Temperature specifications/Heater Symbol y Number of auto switches/Mounting position — A B C Quantity Without auto switch 2 1 1 Rear flange surface Indicator Pilot port direction Without indicator Flange side Flange side With Left flange surface Rear flange surface indicator Right flange surface Left flange surface Without Rear flange surface indicator Right flange surface Flange side t Auto switch type Heater — — With 100 °C heater With 120 °C heater ∗ Size 16 is not applicable...

Aluminium High Vacuum Angle Valve XLA/XLAV Series Air Operated, With Solenoid Valve Solenoid valve Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction With indicator Without indicator Solenoid valve direction Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Rear flange surface Right flange surface Left flange surface r Auto switch type Symbol Remarks Without auto switch (without magnet) t Number of auto switches/Mounting position Symbol Solid state auto switch Reed auto switch (Not applicable to flange...

XLA/XLAV Series Specifications XLA(V)-16-2 Valve type Normally closed (Pressurise to open, Spring seal) Inert gas under vacuum XLA Operating pressure [Pa(abs)] For standard seal material (FKM): 1.3 x For standard seal material (FKM): 1.3 x 10−11 at normal temperature, excluding gas permeation Flange type at normal temperature, excluding gas permeation Principal materials Body: Aluminium alloy, Bellows: Stainless steel 316L, Chief part: Stainless steel, FKM (Standard seal material) Surface treatment External: Hard anodised Internal: Raw material Pilot pressure [MPa(G)] Pilot port size ∗1 Conductance...

Aluminium High Vacuum Angle Valve XLA/XLAV Series Auto switch (Option) XLAV: Air operated, With solenoid valve N ∗1 The E dimension applies when the heater option is included. (Lead wire length: Approx. 1 m) ∗ (a), (b), (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For details, refer to Common Option [2] Mounting position of the heater on page 17. Solenoid valve

Aluminium High Vacuum Angle Valve Double Acting, Bellows Seal e Pilot port direction Rear flange surface Symbol Pilot port direction Flange side — Left flange surface K Rear flange surface L M Right flange surface Right flange surface Left flange surface Flange side r Temperature specifications/Heater Symbol t Auto switch type Heater — — With 100 °C heater With 120 °C heater ∗ Size 16 is not applicable to H4, H5. Size 25 is not applicable to H4. ∗ Heater cannot be retrofitted for the H0 type. y Number of auto switches/Mounting position Symbol Quantity Without auto switch 2 1 1 Mounting position...

Aluminium High Vacuum Angle Valve Valve type Inert gas under vacuum XLC 5 to 60 (High-temperature type: 5 to 150) 1 x 10−6 to atmospheric pressure Operating pressure [Pa(abs)] Conductance [l/s]∗1 Leakage [Pa·m3/s] Double acting (Dual operation), Pressurise to open/close Fluid Operating temperature [°C] For standard seal material (FKM): 1.3 x 10−10 at normal temperature, excluding gas permeation For standard seal material (FKM): 1.3 x 10−11 at normal temperature, excluding gas permeation Flange type Principal materials Body: Aluminium alloy, Bellows: Stainless steel 316L, Chief part: Stainless...

XLC Series Dimensions XLC: Air operated Auto switch (Option) Auto switch (Option) ∗1 The E dimension applies when the heater option is included. (Lead wire length: Approx. 1 m) ∗ (a), (b), (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For details, refer to Common Option [2] Mounting position of t

Aluminium High Vacuum Angle Valve Normally Closed, O-ring Seal XLF/XLFV Series e Indicator/Pilot port direction r Temperature specifications/Heater Symbol y Number of auto switches/Mounting position — A B C Quantity Without auto switch 2 1 1 Rear flange surface Indicator Pilot port direction Without indicator Flange side Flange side With Left flange surface Rear flange surface indicator Right flange surface Left flange surface Without Rear flange surface indicator Right flange surface Flange side t Auto switch type Heater — — With 100 °C heater With 120 °C heater ∗ Size 16 is not applicable to...