Circulating Fluid Temperature Controller • Temperature stability: More effective energy-saving through use of an inverter pump Inverter type Power consumption 0.5 kWh/h Facility water • Cooling capacity: • Temperature range setting: Refrigerant-free and energy saving type using no compressor. Ideal for ordinary temperature and high temperature processes. • Type of circulating fluid: Fluorinated fluids/Ethylene glycol aqueous solution/Clear water, Deionized water Water-cooled Thermo-chiller Series HRW Related Products Technical Data International standards:

Energy-Saving and Refrigerant-free Existing model Energy-saving and refrigerant-free (Ordinary temperature up to 194°F (90°C)) Facility water circuit Refrigeration circuit Circulating fluid circuit Heat exchanger The water-cooled Thermo-chiller which does not use a compressor (refrigerant-free) is suitable for processes operating from ordinary temperature to 194°F (90°C). The energy-savings shown below can be achieved in comparison with existing models (depending on the conditions). Heat exchanger Power consumption: Max. reduction (SMC comparison) The power consumption can be reduced by direct...

High Performance Easy Maintenance (when a load is stable) Circulating fluid inside a Thermo-chiller tank can be recovered automatically. (Recovery volume: 3.2 gal (12 L)) is to to do tion have munica y ou All y the com recover pushutton for eset! b and r Up to 30 kW cooling capacity achieved. Internal pump Option N2 purge port Circulating fluid outlet Circulating pump Heater Existing model Customer’s machine Non-return Heat exchanger valve Facility water inlet 35 Circulating fluid recovery tank Facility water outlet Circulating fluid return port Main tank 20 30 40 50 60 70 Temperature difference...

Electrical Resistivity Control Communications ˾ Contact input/output signal ˾ Serial RS-485 communication ˾ Analog communication (Refer to “Options” on page 118.) ˾ DeviceNet communication (Refer to “Options” on page 118.) DI control kit (Refer to “Options” on page 118.) Electrical resistivity of circulating fluid (ethylene glycol aqueous solution and deionized water) can be controlled. Wetted parts adopt the materials compatible for various circulating fluids. (Stainless steel, EPDM, etc.) • Fluorinated fluids: Flourinert™ FC-40 GALDEN® HT200 • 60% ethylene glycol aqueous solution • Deionized...

Application Examples Semiconductor Example: Temperature control of chamber electrode Example: Blood preservation Upper electrode Wafer • X-ray instrument • MRI • Blood preservation equipment Example: Tofu (Bean curd) production Example: Electronic microscope • Etching equipment • Coating equipment • Spatter equipment • Dicing equipment • Cleaning equipment • Tester, etc. Lower electrode Electronic microscope production equipment Water temperature control for forming tofu by mixing the boiled soybean milk and bittern • Electron microscope • X-ray analytical Prevents the distortion caused by the...

Model Selection • Required Cooling Capacity Calculation---- Page 105, 106 • Circulating Fluid Typical Physical I Fluorinated Fluid Type Cooling Capacity/Heating Capacity/ Ethylene Glycol Type Cooling Capacity/Heating Capacity/ Clear/Deionized Water Type Cooling Capacity/Heating Capacity/ • Common Specifications • Circulating Fluid Automatic Recovery---- Page 119 • Optional Accessories • 60% Ethylene Glycol Aqueous

Model Selection Guide to Model Selection 1. How much is the temperature in degrees centigrade for the circulating fluid? Temperature range which can be set with the Thermo-chiller H: 68 to 195°F (20°C to 90°C) Example) Customer requirement: 122°F (50°C) 2. What kind of the circulating fluids will be used? Relationship between circulating fluid (which can be used with the Thermo-chiller) and temperature Fluorinated fluids: Fluorinert™ FC-40/GALDEN® HT200 60% ethylene glycol aqueous solution Clear water/Deionized water 68°F (20°C) Example) Customer requirement: Clear water 3. How much is the temperature...

Model Selection Required Cooling Capacity Calculation Example 1: When the heat generation amount in the customer’s machine is known. Heat generation amount Q: 3.5 kW Example 2: When the heat generation amount in the customer’s machine is not known. ∗ Refer to page 107 for the typical physical property values by circulating fluid. Fluorinated fluid Density γ: 1.80 x 103 kg/m3 Specific heat C: 0.23 kcal/kg·°C (at 20°C) ∗ Refer to page 107 for the typical physical property values by circulating fluid. = 3456 W = 3.5 kW Cooling capacity = Considering a safety factor of 20%, 3.5 x 1.2 = 4.2 kW Cooling...

Required Cooling Capacity Calculation Example 3. When there is no heat generation, and when cooling the object below a certain temperature and period of time. Cooled substance total volume V Cooling time h Cooling temperature difference ∆T Facility water temperature Circulating fluid Specific heat C: 1.05 x 103 J/(kg·K) (at 50°C) ∗ Refer to page 107 for the typical physical property values by circulating fluid. Cooling capacity = Considering a safety factor of 20%, 2.4 x 1.2 = 2.9 kW (When the circulating fluid temperature is 50°C.) (In this case, selected Thermo-chiller model will be the HRW008-H.)...

Model Selection ∗ The below shown are reference values. Please contact circulating fluid supplier for details. Circulating Fluid Typical Physical Property Values Fluorinated Fluids Density γ 3 Specific heat C ([kcal/kg·°C]) Physical property value Temperature Physical property value Temperature Specific heat C: 4.2 x 103 [J/(kg·K)] (1.0 [kcal/kg·°C]) Technical Data Related Products 60% Ethylene Glycol Aqueous Solution

Fluorinated Fluid Type Fluorinated Fluid Type Cooling capacity Symbol Cooling capacity Analog communication DeviceNet communication NPT fitting Circulating fluid automatic recovery Pump inverter control Temperature range setting H Temperature range setting Pump inverter control None Applicable (Pump inverter type) Specifications (For details, please consult our “Product Specifications” information.) HRW002-H HRW002-HS Ambient temperature/humidity Note 1) Circulating fluid Note 2) Temperature range setting Note 1) Cooling capacity (50/60 Hz common) (kW) Facility water temperature Circulating fluid...