Peltier-Type Temperature Control System for Chemicals Fluororesin heat exchanger allows direct temperature control for chemicals!! Chemical Thermo-con Temperature controller Peltier device (Thermo-module) Type of circulating fluid • Deionized water • Hydrofluoric acid • Ammonia hydrogen peroxide solution, etc. Chemical fluid tank or chemical bath Fluororesin heat exchanger Chemical Thermo-con Facility water Industry-leading withstand pressure 51 psi !! Cooling capacity (with water): Related Products International standards: SEMI Standard S2-0706, F47-0706 Environment friendly: 50° to 140°F(10° to 60°C) Temperature stability: ±0.18°F (±0.1°C) Operating temperature range: Technical Data With leakage detection function

Allows direct control of chemical temperature. PFA wetted parts material prevents contamination from metal ion elution. No need for a tube-type heat exchanger. No need for a tubeDirect temperature control Indirect temperature control type heat exchanger. Can directly control temperature of chemicals. Chemical fluid tank Chemical fluid tank Temperature controller Tube type Pump heat exchanger Fluororesin heat exchanger Chemical Thermo-con Compact and Light Self-developed heat exchanger matched to the configuration of the Peltier device (Thermo-module). Compact and light W Existing model Heat Exchanger...

Principle of Peltier Device (Thermo-module, Thermoelectric device) The Peltier device (thermo-module, thermoelectric device) is plate-shape solid state element with P-type, N-type semiconductor arrayed alternately. When direct current is supplied to the element, heat moves from one surface to another along with electron flow in N-type semiconductor and electron hole in P-type semiconductor. As a result of the heat move, one surface of the element absorbs heat and decrease temperature. And other surface heats up. When the DC current is switched to reverse direction, the heat move will also be...

Model Selection Guide to Model Selection Example 1: When the heat generation amount in the customer’s machine is known. Heat generation amount Q: 400 W (at 77°F (25°C)) Cooling capacity = Considering a safety factor of 20%, select 400 W x 1.2 = 480 W (at 77°F (25°C)) or more. Example 2: When the heat generation amount in the customer’s machine is not known. Obtain the temperature difference between inlet and outlet by circulating the circulating fluid inside the customer’s machine. Customer’s machine Flow rate gauge L : Unknown : 1.0°C (1.0 K) : 20°C (293.15 K) : 21°C (294.15 K) : 7 L/min : Water...

Chemical Thermo-con How to Order Part number of set (Temperature controller + Heat exchanger) Note) The model numbers of the temperature controller and heat exchanger are printed respectively on the product name label. Temperature controller Chemical Thermo-con Cooling capacity 003 005 007 Combination in Set Part number of set Heat exchanger ∗ The tube size should be specified when ordering. Heat exchanger Temperature controller Temperature controller Heat exchanger

Chemical Thermo-con Main Specifications (For details, please consult our “Product Specifications” information.) Heat Exchanger Specifications Heat exchanger model Cooling capacity (Water) Note 1) Heating capacity (Water) Note 1) Peltier device (Thermoelectric device, Thermo-module) Radiating method Operating temperature range 50 to 140°F (10 to 60°C) (depending on the type of circulating fluid) Applicable fluid Note 2) Operating pressure Note 3) Deionized water, Hydrofluoric acid, Ammonia hydrogen peroxide solution, etc. Wetted parts material Tube size (PFA tube) Wetted parts material Max. operating...

The values shown on the performance chart are representative and not guaranteed. Allow a margin for safety to device when choosing the product. Cooling Capacity Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 gpam (5 L/min) Circulating fluid temperature (°C) Circulating fluid temperature (°C) Circulating fluid temperature (°C) Heating Capacity Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) Circulating fluid temperature (°C) Circulating fluid temperature...

Chemical Thermo-con Pressure Loss in Circulating Fluid Circuit Clear water Clear water Pressure Loss in Facility Water Circuit Flow rate (L/min) Flow rate (L/min) Pressure loss Flow rate (L/min) Flow rate (L/min) Technical Data Related Products Pressure loss

Communication connector ∗ The RS-232C uses only lower side connector. Facility water outlet 3/8" x 1/4" Power switch Facility water inlet 3/8" x 1/4" Circulating fluid inlet Model no. label (Heat exchanger) 10.3 (263) Model no. label (Controller) (0.8 (20)) Signal connector Fluid leak sensor Terminal block Alarm output connector (1.2 )30)) Heat exchanger Wire color Circulating fluid tube size Connector: IEC 60320 C13 or equivalent Cable: 14AWG, O.D. ø8.4 Heat exchanger model Power Cable (Accessory) Circulating Fluid Tube Size 4.3 (110) Signal cable 16 ft (5 m) Circulating fluid 0.8 (20) outlet...

Chemical Thermo-con Fluid leak sensor REMOTE ON/OFF EXT.SENSOR + - FG A B B FG Signal connector Model no. label (Controller) Terminal block Power connector Facility water inlet 3/8" x 1/4" Circulating fluid inlet Model no. label (Heat exchanger) Facility water outlet 3/8" x 1/4" Power switch Display panel Alarm output connector Circulating fluid outlet Communication connector ∗ The RS-232C uses only upper side connector. Temperature controller Heat exchanger Connector: DDK CE05-6A18-10SD-D-BSS Cable: 12AWG, O.D. ø11.8 Contents Technical Data Wire color Power Cable (Accessory) Related Products...

Use the special power cable included with the temperature controller. Connect the DC cable and signal cable that come from the heat exchanger to the DC and signal connectors of the temperature controller. b Prepare other required connectors and wiring by the customer. b 1. Power connector IEC 60320 C14 or equivalent 4. Terminal block Morimatsu Co., Ltd.: M111A-7A, for holding screw M3 Connection cable: 22AWG or more, max. 32.8 feet (10 m) Connect the included special power cable. Pin No. Signal contents Signal contents Remote ON/OFF – Power connector External sensor: Terminal B of resistance...