Accurately controls the temperature of liquid in the bath. Temperature stability: ±0.018°F Temperature distribution: ±0.036°F in the bath RoHS • Environmentally friendly and refrigerant-free • Heaterless • Function to detect abnormal heating and temperature sensor errors comes standard. • Light and compact • Greatly reduced vibration and operating noise when compared with the refrigerated type. Thermoelectric Bath Water, Fluorinated liquid Fluorinert™ GALDEN® Applications • Chemicals for MOCVD • Diffusion gas • Various samples, materials and parts • Chemicals and liquids with high viscosity Related Products Circulating fluid Peltier element Technical Data Circulating pump Facility water outlet Facility water inlet

Features Exclusively developed dual tank construction to provide consistent temperature at any position in the bath Peltier element (Thermo-module, Thermoelectric device) Temperature sensor • Accurate display by measuring the circulating fluid with a temperature sensor directly Circulating pump Application Examples Semiconductor Various tests Evaporation of chemicals for MOCVD Temperature control of diffusion gas Thermal test with immersion Various chemical processes Physical and chemical analysis Temperature control of various samples, materials and parts Indirect temperature control of chemicals...

Peltier-Type Thermoelectric Bath Series HEB Combination (Controller + Liquid tank) ∗ The option should be specified when ordering. Liquid tank size 10 ø5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank Liquid tank Cooling capacity ∗ The option should be specified when ordering. Liquid tank Liquid tank size 10 ø5.1 in (130 mm) x H7.1 in (180 mm) Radiating method Water-cooled Technical Data Related Products

Specifications (For details, please consult our “Product Specifications” information.) Model Cooling method Peltier device (Thermo-module, Thermoelectric device) Radiating method Liquid tank: Water-cooled, Controller: Forcible air-cooled Control method Cooling/Heating automatic shift PID control Ambient temperature/humidity Circulating fluid system Application fluid Note 1) Set temperature range Note 1) Note 5) Cooling capacity Note 2) Heating capacity Note 2) Temperature stability Note 3) Temperature distribution Note 3) Facility water system Tank dimensions Internal diameter ø130 x Liquid level...

Peltier-Type/Thermoelectric Bath Heating Capacity Time (minute) 110 Ambient temperature: 77° (25°C) Liquid level: 7.1 in (180 mm) (Liquid temperature: 77° (25°C)) Facility water temperature: 77°F (25°C) Facility water flow rate: 0.8 gpm (3 L/min) 90 Shut out from outside with a lid (polystyrene foam) 70 40 50 60 70 80 Time (minute) Pressure Loss in Facility Water Circuit 0.25 The values shown on the performance chart are not guaranteed, but typical. Allow margins for safety when selecting the model. Pressure loss Ambient temperature: 77°F (25°C) Liquid level: 7.1 in (180 mm) (Liquid temperature:...

Dimensions Liquid tank 7.9 (200) Warning label Signal connector Model no. label Signal cable Facility water outlet Rc1/4 For -N spec. NPT1/4 Facility water inlet Rc1/4 For -N spec. NPT1/4 Internal dimensions of liquid tank RUN LED (Green) Temperature sensor Circulating pump Rubber foot Controller Ventilation hole (Air IN) The opposite face has the same shape. MODE FUNC Alarm output connector Signal connector Air OUT SIGNAL ALARM DC OUTPUT Warning label Power connector Power cable Signal cable Display/Operation panel

Peltier-Type/Thermoelectric Bath Connectors Water Bath and Controller Connection Power Cable Connection Connector for External Equipment ˾ Connector for water baths Connectors that fit with a communication connector and an alarm output connector should be prepared by customer. ˾ Alarm output connector Hirose Electric Co., Ltd.: CDE-9P Holding screw M2.6 Fitting connector: CDE-9S or equivalent Pin No. 1 2 Signal cable Nanaboshi Electric Mfg. Co., Ltd.: NJC-245-PF UL CSA Female connector Hirose Electric Co., Ltd.: CDA-15S Holding screw M2.6 Female connector Connector side IEC 60320 C-13 or equivalent...

Specific Product Precautions 1 Be sure to read this before handling. Refer to back page 1 for Safety Instructions andback pages 2 to 5 for Temperature Control Equipment Precautions. System Design Circulating Fluid Warning 1. The catalog shows the specifications of the Thermoelectric Bath. 1. Check detailed specifications in the separate “Product Specifications”, and evaluate the compatibility of the Thermoelectric Bath with customer’s system. 2. The Thermoelectric Bath is equipped with a protective circuit independently, but the whole system should be designed by the customer to ensure safety....

Specific Product Precautions 2 Be sure to read this before handling. Refer to back page 1 for Safety Instructions and back pages 2 to 5 for Temperature Control Equipment Precautions. Warning 1. Prevention of electric shock and fire Do not operate the switch with wet hands. Also, do not operate the Thermoelectric Bath with water or fluid left on it. 2. Action in the case of error If any error such as abnormal sounds, smoke, or bad smell occurs, cut off the power at once, and stop supplying facility water. Please contact SMC or a sales distributor to repair the Thermoelectric Bath. Related Products...