Single Stage Compact Regulator for Ultra High Purity Series AP500 ¡For UHP gas delivery ¡Flow capacity Standard: to 15 slpm HF (option): to 30 slpm ¡Body material: 316L SS secondary remelt ¡Hastelloy internals available for corrosion resistance ¡Sub-atmospheric pressure delivery option How to Order Port Number q Delivery pressure 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) 0.5 to 30 psig (0.0034 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 1 to 100 psig (0.007 to 0.7 MPa) Body 316L SS secondary remelt Pressure gauge unit ∗3) Surface finish Code No code M V X Surface finish Ra max 15 µin. (0.4 µm) Standard 10 µin. (0.25 µm) 7 µin. (0.18 µm) 5 µin. (0.13 µm) Code Unit No code psig/bar MPa MPA ∗3) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan. qIN wOUT eGauge port (Outlet) Connections (Inletq, Outletw) Code FV4 MV4 TW4 Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld Specifications Operating Parameters Delivery pressure AP510 AP501 AP502 AP506 1 to 100 psig 0.5 to 10 psig 0.5 to 30 psig 1 to 60 psig (0.007 to 0.7 MPa) (0.0034 to 0.07 MPa) (0.0034 to 0.2 MPa) (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) –40 to 160°F (–40 to 71 °C) (No freezing) ∗1) 0.06 2 x 10-11 Pa·m3/sec 2 x 10-10 Pa·m3/sec ∗2) 4 x 10-9 Pa·m3/sec ∗2) Ra max 15 µin. (0.4 µm) Option: 10 µin. (0.25 µm), 7 µin. (0.18 µm), 5 µin. (0.13 µm) Face seal, Tube weld 0.2 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.15 in3 (2.4 cm3) 0.99 lbs (0.45 kg) ∗3) Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Inboard leakage Leak rate Outboard leakage Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass ∗1) 14 to 194°F (–10 to 90 °C) for Vespel® seat. ∗2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). ∗3) Mass, including individual boxed weight, may vary depending on connections or options. Connections or Pressure gauge ∗2) psig/bar unit MPa unit No gauge port No code 1/4 inch face seal (Male) MV4 No 1/4 inch face seal (Female) FV4 pressure gauge 1/4 inch tube weld TW4 -30in.Hg to 30psig -0.1 to 0.2 MPa V3 With pressure -30in.Hg to 60psig -0.1 to 0.4 MPa L gauge -30in.Hg to 100psig -0.1 to 0.7 MPa 1 ∗2) Refer to gauge guide (P.94) for gauge specifications. Code Seat material Code Material No code PCTFE (Standard) PTFE ∗4) TF Vespel® ∗5) VS ∗4) PTFE recommended for applications such as within a process tool. ∗5) Not available with SH material. Gauge port (Outlete) Porting Configuration (Top view) w Code Specification Cv Standard No code 0.06 Friction dampener ∗6) FI High flow ∗7) 0.1 HF ∗6) FI is friction dampener to slow response and reduce interaction with MFC. ∗7) VS material not available with HF option. Code Specification Standard No code Sub-atmospheric A

Option High flow Higher flow capacity with internal changes only, no change in external dimensions. Changes from the standard type are: AP501२२A Option Other Parameters AP501 AP502 AP506 AP510 0.1 Cv HF 0.4 psig (0.0028 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Supply pressure effect Flow Characteristics AP500 Inlet pressure: Inlet pressure: Input pressure : 2 psig (14 kPa) Hastelloy ® is a registered trademark of Haynes International. Elgiloy ® is a registered trademark of Elgiloy Specialty Metals. Vespel® is a registered trademark of DuPont. Check Valves 2 x...

Single Stage Regulator for Ultra High Purity Series AP1000 ¡For UHP gas delivery ¡High inlet pressure type: Max. 3500 psig (24.1 MPa) ¡Flow capacity Standard: to 30 slpm HF (option): to 120 slpm ¡Body material: 316L SS secondary remelt ¡Hastelloy internals available for corrosion resistance How to Order Port Number q Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Material Body Diaphragm Nozzle Code Poppet 316L SS 316L SS S 316L SS 316L SS SHP secondary remelt SH...

Wetted Parts Material Flow Characteristics Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Inlet pressure: 200 300 Flow rate (slpm, N2) Inlet pressure: 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) 40 60 Flow rate (slpm, N2) Inlet pressure: 60 Delivery pressure (psig) 0 Hastelloy ® is a registered trademark of Haynes International. Vespel® is a registered trademark of DuPont. Delivery pressure (psig) Delivery pressure (psig) S SHP SH H 316L SS secondary remelt Hastelloy ® C-22 Electropolish + Passivation Electropolish Hastelloy ® C-22 316L SS 316L SS Hastelloy ® C-22 Hastelloy ® C-22...

High flow (Tied-diaphragm) Single Stage Regulator for Ultra High Purity Series AP1200 ¡For UHP gas delivery ¡Body material: 316L SS ¡High inlet pressure type Standard: Max. 1700 psig(11.7 MPa) secondary remelt HR(option): Max. 3000 psig (20.7 MPa) ¡Hastelloy internals available ¡Flow capacity Standard: to 800 slpm for corrosion resistance HF (option): to 1000 slpm ¡Tied-diaphragm design FC (option): to 1500 slpm How to Order Port Number q Delivery pressure Code 02 06 10 15 25 Code S SHP SH Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to...

Wetted Parts S SH SHP 316L SS secondary remelt Body Electropolish + Passivation Surface finish Hastelloy ® C-22 316L SS Poppet Hastelloy ® C-22 Diaphragm 316L SS Hastelloy ® C-22 Nozzle PCTFE PCTFE (Option: Vespel®) Seat Flow Characteristics 3. High inlet pressure Changes from the standard type are: Option Other Parameters AP1210 AP1215 Vacuum to 3000 psig (20.7 MPa) ∗) Source pressure 4500 psig (31 MPa) HR Proof pressure (Inlet) 9000 psig (62 MPa) Burst pressure ∗) 3/4 inch face seal fittings rated to 2400 psig (16.5 MPa) maximum. Inlet pressure: Delivery pressure (psig) Inlet pressure:150 psig...