For high precision matters. CGO-60.5 - Goniometer Stage All piezoelectric goniometer stages are based on SmarAct piezo drive technology. Goniometer stages are available with different radii. In addition to their compactness, these stages are very rigid and therefore ideally suited for microor nanopositioning tasks. Due to the usage of high precision crossed roller bearings, their angular accuracy is very high. The goniometer stages offer highest resolution of motion and are directly stackable. By combining two stages with appropriate radii, it is possible to build a compact Euler goniometer with a common center of rotation. Their mechanical interface perfectly fits the CLS-52 series stages. Thus, allowing the creation of multi-axis systems by direct combination of linear, rotation and goniometer stages. SmarAct's goniometer stages can be operated by any of our control units and are also available with integrated positioning sensors. Furthermore, the CGO series goniometer stages are available for different environmental conditions, such as high vacuum and ultra-high vacuum environments. Since the CGO-60.5 is equipped with an exchangeable drive unit, easy access to the stage's core component for servicing is guaranteed. The CGO-60.5 goniometer stage can be easily stacked on top of the CGO-77.5 stage to form an Eulerian cradle with a common center of rotation 60.5 mm above the working platform. Dimensions [mm] Weight [g] Center of Rotation [mm] 50 x 50 x 17 ~ 140 60.5 (above working platform) Generated Spec Sheet: 19.01.2022 - https://www.smaract.com/goniometer-stages/product/cgo-60-5-goniometer-stage Copyright © 2022 SmarAct GmbH • All Rights Reserved. SmarAct GmbH | Schuette-Lanz-Strasse 9 | 26135 Oldenburg | Germany T: +49 441 – 800 879 0 | Email: info-de@smar

For high precision matters. Open-Loop Resolution [µrad] Sensor Types Closed-Loop Resolution [µrad] Closed-Loop Repeatability, Full Stroke MCS2 [µrad] Material Options Vacuum Options Options Aluminum as standard; Steel base (-ST); Titanium base (-TI) HV (1E-6 mbar); UHV / UHVT (1E-11 mbar) Generated Spec Sheet: 19.01.2022 - https://www.smaract.com/goniometer-stages/product/cgo-60-5-goniometer-stage Copyright © 2022 SmarAct GmbH • All Rights Reserved. SmarAct GmbH | Schuette-Lanz-Strasse 9 | 26135 Oldenburg | Germany T: +49 441 – 800 879 0 | Email: info-de@smar