High Precision Positioning, Automation and Metrology.

Copyright © 2022 SmarAct GmbH Specifications of components and systems presented in this catalog are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams, data etc. prohibited. The information given in this catalog has been carefully checked. Nevertheless, errors cannot be completely excluded. To always receive the latest information and specifications on our products, please contact our team or visit smaract.com. SmarAct GmbH, Schuette-Lanz-Straße 9, 26135 Oldenburg, Germany Phone: +49 (0) 441 - 800879-0 Telefax: +49 (0) 441 - 800879-21 Internet:...

Table of Contents Introduction SmarAct Motion SMARSLIDE – High Precision Piezo Stages Linear Piezo Stages (12) – Stages with Exchangeable Drive Units (25) High Load Stages (30) – Goniometer Stages (34) – Micro-Grippers (36) Rotation Stages (40) – Hybrid Drives (46) – Cryogenic Stages and Systems (49) Closed-Loop Cryogenic Stages (50) – Cryogenic Rotation Stages (52) Ultra High Vacuum Stages and Systems (54) – Non-Magnetic Stages and Systems (55) SMARFLEX – Nanoprecision Flexure Stages SMARSHIFT – High Precision Electromagnetic Direct Drives Electromagnetic Linear Stages (62) – Electromagnetic...

Page 4 | Introduction | www.smaract.com

Dear customer, Are you looking for innovative products to advance your applications in the field of high precision technology? Whether it’s positioning technology, metrology or automation technology, we are the right partner for you. Your confidence in our capabilities and joint successes have led our team to grow to 200 highly skilled members. Our ever-growing product portfolio includes proven items and/or systems for your diverse needs. In addition, we excel in designing special devices tailored to your needs and implementing them in an uncomplicated and speedy manner. We have strengthened...

SmarAct Services Help & Support Your Partner for High Precision in Positioning, Automation and Metrology Customer Service Equipment Rental Service To meet your specific requirements – no matter whether it is a highly complex or a recurrent high-volume OEM positioning system – is our main interest. We will support you with maximum flexibility in developing and manufacturing custom solutions. Our team consists of experts with technical backgrounds in fields such as physics, materials science, optics and life science. Many of our positioning and metrology systems can be rented. We would be very...

Help & Support www.smaract.com | Introduction | Page 7 SmarAct Services

The SMARPOD is a hexapod-like positioning system which uses linear stages in a parallel kinematic design to create a positioning system with six degrees of freedom. motion Page 8 | High Precision Positioning | www.smaract.com

SmarAct Motion High Precision Positioning Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions. SmarAct Motion develops and uses various technologies with specific advantages that you can discover on the following pages. We have developed this for you to meet the diverse requirements for high-precision positioning in different application areas. However, all fields of application have one thing in common: the need for very high accuracy and flexibility. A large range of standard components consisting of linear,...

Piezo Stages SMARLIDE Stages Some Subline Text One of the three positioning turrets of a SMARPOD consisting of two SLC series stages and a guideway. Page 10 | High Precision Positioning | www.smaract.com

SMARSLIDE – Piezo Stages Unique Features SMARSLIDE stages use SmarAct’s stick-slip piezo drive technology, which is unique in combining the unmatched resolution of the piezo motion principle with macroscopic travel ranges made possible by repeated stepping. The stages feature large positioning ranges from a few mm to over a meter for linear stages and of several degrees for rotation and goniometer stages. The SMARSLIDE positioners provide you with a number of advantages for your nanopositioning systems: High Resolution and Long Travel Range SMARSLIDE piezo stages provide closed-loop positioning...

SMARSLIDE – Linear Piezo Stages SMARLIDE Stages SMARSLIDE Nanometer Piezo Stages Linear SMARSLIDE stages have high resolution, typical of piezos, combined with a large positioning range from a few mm to over a meter. SMARSLIDE includes several series of linear positioning stages. Each one was developed with our customers’ requirements in mind. The full compatibility between the components of the different product lines allows to select stages with specific key features to combine them into sophisticated multi-axis systems. SLC Series Linear stages of the SLC series are based on linear slides...

SMARSLIDE – Linear Piezo Stages Overview SMARLIDE Stages Long travel SLC series stages can be mounted on top of each other to create gantries or large XY platforms. Blocking Force [N] Max. Normal Force [N] Max. Lift Force [N] Cross Section W x H [mm] Velocity [mm/s] Open-Loop Resolution [nm] Sensor Resolution [nm] UniDirectional Repeatability [nm]* Vacuum Compatibility * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using...

SMARLIDE Stages Page 14 | High Precision Positioning | www.smaract.com

SMARSLIDE – Linear Piezo Stages Stage Options at a Glance Higher Blocking Force For applications that require very low temperatures down to the mK range, specialized versions of our SLC, SR, SRT and STT stages are available. For high-performance positioning under cryogenic conditions, SmarAct offers closed-loop cryogenic stages. Please see page 49 for further information about stages and systems for cryogenic applications. The blocking force is the maximum external force a SMARSLIDE stage can withstand without slipping. It corresponds to the maximum force that can be applied by the stage to another...