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Catalog 22
Catalog 22
SmarAct GmbH is a company specializing in high precision technology, focusing on positioning, metrology, and automation. It is divided into three business units: Motion, Metrology, and Automation, each providing innovative and customized solutions.
SmarAct Motion
This unit develops high-precision products for nano-positioning, including:
- SMARSLIDE: Piezoelectric positioning stages with high precision.
- SMARSHIFT: Electromagnetic positioning stages.
- SMARFLEX: High-resolution dynamic scanners.
- SMARBOTIC: Complex positioning systems and robots.
SmarAct Metrology
Offers high-resolution measurement tools for component characterization, including:
- PICOSCALE Interferometers: Compact laser interferometers.
- METIRIO®: Miniaturized optical encoders.
- PICOSCALE Vibrometers: Vibration detection tools.
- SMARPROBE: Nano-probing platform.
SmarAct Automation
Focuses on automating the production of miniaturized components, offering high-throughput production equipment.
SMARSLIDE – High Precision Piezo Stages
These stages offer high resolution and long travel ranges, suitable for various applications. They are compact and versatile, with features like:
- Closed-loop positioning resolution below one nanometer.
- Self-clamping and backlash-free design.
- Low thermal drift and high resonance frequencies.
Linear Piezo Stages
SMARSLIDE linear stages are available in several series, designed for specific applications, with options for cryogenic and vacuum environments.
Conclusion
SmarAct provides a wide range of high-precision positioning solutions, focusing on customization and quality to meet diverse industry needs.
The document details specifications and options for SMARSLIDE linear piezo stages, focusing on the SLC, SL, CLS, and CLL series, designed for high precision positioning with customization options.
Position Sensors
Optical and inductive sensors can be integrated for closed-loop position control.
Higher Blocking Force
Stages can be modified for higher blocking force without changing dimensions.
Constant Force Spring
A constant force spring can be added to lift vertical loads.
U-Shaped Base
The SLC series offers a U-shaped base for increased mechanical strength.
SLC-17 Series
Compact dimensions with travel ranges up to 51 mm, offering various configurations.
SLC-24 Series
Increased rigidity with travel ranges up to 123 mm.
SL Series
Ultra-compact stages for space-constrained setups.
Exchangeable Drive Units (EDUs)
Allow quick replacement of drive units, reducing downtime.
CLS Series
Can be combined into XY configurations without additional elements.
CLL Series
Suitable for precise positioning over long distances.
Conclusion
The document highlights the versatility and customization options of SMARSLIDE stages for high precision applications.
Hybrid drives combine SMARSLIDE stick-slip drives and piezo scanners into a compact device, using the same feedback signal for closed-loop positioning.
Specifications of DLS-3232 Hybrid Drive
- Mechanical travel: 21 mm
- Scan range: > 10 µm
- Blocking force: > 3.5 N
- Max normal force: 5.0 N
- Weight: 40 g
- Dimensions: 32 x 32 x 13.1 mm
- Resonance frequency: > 700 Hz
- Base material: Aluminum
- Open-loop velocity: up to 20 mm/s
- Closed-loop sensor resolution: < 1 nm
- Uni-directional repeatability: ±40 nm
- Vacuum options: HV (10-6 mbar); UHV (10-11 mbar)
- Non-magnetic option available
SMARSLIDE stages are designed for cryogenic applications, allowing precise manipulation at low temperatures with low-heat profiles and ultra-high vacuum compatibility.
Cryogenic Linear Stages
- Travel ranges from 6 mm to 41 mm
- Blocking force: ≥ 2 N
- Max normal force: 20-30 N
- Vacuum options: HV and UHV
- Non-magnetic options available
Suitable for high vacuum environments, bakeable up to 150°C.
Non-Magnetic Stages
Made from titanium, ceramics, and copper for non-magnetic applications.
SMARFLEX Nanoprecision Flexure Stages
Use piezo-driven mechanical flexures for precise positioning tasks, available in non-magnetic materials.
The document provides information on SMARSHIFT stages and SMARBOTIC systems, focusing on high precision positioning solutions.
SMARSHIFT Stages
- Compact design balancing force and volume.
- Electromagnetic direct drives for high speed and precision.
- Customization for specific requirements.
- Dynamic performance with high accelerations and velocities.
- Long travel range limited by magnet array length.
- MLS Series: Models with varying travel ranges and forces.
- MLL Series: Suitable for XY positioning systems.
- MR Series: Compatible with linear stages for high loads.
- High precision positioning for multi-dimensional tasks.
- Modular system for adaptable setups.
- Examples include 6D positioning systems.
The document emphasizes the adaptability and precision of SMARSHIFT and SMARBOTIC systems for complex positioning tasks.
Specifications: Details on 2 DoF, 3 DoF, and 4 DoF systems, as well as SMARPOD and TRIPOD systems, with information on degrees of freedom, travel range, payload capacity, and resolution.
Procedures and Configurations: Explains system configurations using modular connectors and adapter plates for precise positioning.
Control and Software: SmarAct provides software for controlling positioning systems, with interfaces for integration into custom applications.
Applications and Recommendations: Suitable for optical alignment, sample positioning, and micromanipulation, with recommendations for customized solutions.
Key Data from Tables: Tables provide specifications for each system, highlighting the SMARPOD series for high resolution and the TRIPOD series for hybrid design.
The document provides information about SmarAct's TRIPOD systems, SMARGON goniometer, microscope stages, manipulators, and motorized optomechanics for precision positioning.
TRIPOD Systems
Hybrid positioning systems with up to six degrees of freedom, available in vacuum-compatible and non-magnetic versions.
SMARGON Goniometer
Designed for XRD setups, offering large rotation angles and tilt capabilities.
Microscope Stages and Manipulators
Designed for precise sample handling in life sciences, compatible with various microscope models.
Motorized Optomechanics
Includes iris diaphragms and tip-tilt mirror mounts for automated optical setups.
Key Specifications
- TRIPOD systems offer travel ranges up to 63 mm in X and Y directions.
- SMARGON goniometer provides unlimited rotation and tilt capabilities.
- Microscope stages offer travel ranges up to 123 mm in X and 103 mm in Y directions.
- Motorized iris diaphragms have aperture ranges from 0.5 mm to 50 mm.
Conclusion
SmarAct's products are designed for high precision and adaptability, suitable for various scientific and industrial applications.
Specifications:
- Tilt Angles: ±90° with specific resolutions and repeatability.
- Material Options: Standard aluminum with options for steel and titanium bases.
- Vacuum and Non-Magnetic Options: Available for high and ultra-high vacuum environments.
- Tip-Tilt Mirror Mounts: Designed for different mirror sizes, offering compact and precise positioning.
- Rectangular Apertures: Allow for adjustable optical paths with independently movable blades.
- Filter Wheels: Available in various sizes and configurations.
- MCS2 Control System: Supports up to 18 positioning stages with user-friendly interfaces.
- SCU – Simple Control Unit: Offers drivers for stick-slip piezo stages with USB and RS232 interfaces.
The document provides an overview of SmarAct's control systems and software solutions, focusing on the EMS and SDC2 systems.
EMS – Embedded Microsensor System
A compact OEM single board controller for integration into existing electronics, supporting SMARSLIDE stages.
SDC2 – Step Direction Controller
A low-level control system for SMARSLIDE piezo stages, providing high-resolution control.
Software Tools
Includes the Precision Tool Commander and development kits for various programming languages.
SmarAct Automation
Specializes in high-precision automation solutions for microassembly.
SmarAct Metrology
Provides high-precision measurement solutions, including the METIRIO® optical encoder.
METIRIO® Optical Encoder
Designed for closed-loop positioning with high resolution and compact size.
The document provides technical information about the METIRIO® Optical Encoder and the PICOSCALE Interferometer.
METIRIO® Optical Encoder
- Electrical Connections: Uses a D-SUB 15 male connector for differential analog signals.
- Pin Description: Includes various outputs and inputs.
PICOSCALE Interferometer
- Key Specifications: Features a maximum bandwidth of 2.9 MHz and a laser wavelength of 1550 nm.
- System Components: Includes sensor heads with different beam geometries.
- Interfaces and Accessories: Offers USB and Ethernet data transfer.
Software and Applications
- Software Features: Supports multi-user interaction and provides APIs for various programming languages.
- Application Examples: Used for closed-loop positioning and vibration analysis.
Vibrometry
- Key Specifications: Offers a resolution of less than 1 pm and a bandwidth of 2.5 MHz.
- Software and Applications: Allows for intuitive operation and extensive data analysis.
Services
- Measurement and Rental Services: Offers measurement services and rental services for interferometers and vibrometers.
Specifications and Features:
- SMARPROBE System: Designed for probing small technology nodes with high precision.
- Electrical Probing: Can be upgraded with a current amplifier for enhanced failure analysis.
- Models: Various models offer different configurations with advanced features.
- Microscopy and Materials Science: Used for precise positioning in SEM imaging.
- High Energy Research Facilities: Solutions for lens alignment and additive manufacturing research.
- Synchrotron Endstations: Multi-axis positioning systems for synchrotron beamlines.
- Utilize closed-loop systems for enhanced precision.
- Consider system upgrades for specific applications.
- Leverage automation and scripting capabilities.
The document discusses advanced positioning systems for high-energy research facilities, including customized SMARPODs for ultra-high vacuum conditions.
Applications in High Energy Research Facilities:
1. Laser-Plasma Accelerators: Used at the REGAE Beamline for precise alignment.
2. Fourier-Transform Infrared Spectroscopy: Enhances sample illumination and alignment.
3. X-Ray Imaging: Offers precise sample positioning for multi-technique imaging.
Advanced Positioning Systems:
1. Serial Femtosecond Crystallography: Improves measurement times and sample throughput.
2. Soft X-Ray Laminography: Enhances spatial resolution capabilities.
Semicon & Photonics Applications:
1. Quantum Networks: Enables breakthroughs in quantum communication research.
2. Laser Ablation Systems: Improves sample preparation efficiency.
Life Science Applications:
1. Ophthalmic Drug Delivery: Enhances treatment accuracy.
2. Two Photon Polymerization: Enables innovative 3D printing applications.
The FAC Alignment Station automates the assembly of FAC lenses to laser diodes, featuring:
- Operation with laser diode bars at visible and near-infrared wavelengths.
- Alignment resolution with translational and rotational steps.
- Active alignment for single and multiple emitters.
- Customized gripper jaws for deterministic gripping.
- Automatic laser module clamping and adhesive dispensing.
- Control software with user interface and scripting interface.
Includes loading, adhesive dispensing, gripping, active alignment, post-cure measurement, and unloading.
The Watt Balance experiment aims to redefine the kilogram by comparing mechanical and electrical powers, using the PICOSCALE Interferometer for precise measurements.
Research at ETH Zurich focuses on particle manipulation in microfluidics, using the PICOSCALE Vibrometer for imaging nanometer vibrations.
SmarAct specializes in high precision positioning, micro automation, and metrology, with a global presence and a focus on customer needs.
SmarAct has contacts in various countries and provides information on their website.
Catalog excerpts
High Precision Positioning, Automation and Metrology.
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Copyright © 2022 SmarAct GmbH Specifications of components and systems presented in this catalog are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams, data etc. prohibited. The information given in this catalog has been carefully checked. Nevertheless, errors cannot be completely excluded. To always receive the latest information and specifications on our products, please contact our team or visit smaract.com. SmarAct GmbH, Schuette-Lanz-Straße 9, 26135 Oldenburg, Germany Phone: +49 (0) 441 - 800879-0 Telefax: +49 (0) 441 - 800879-21 Internet:...
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Table of Contents Introduction SmarAct Motion SMARSLIDE – High Precision Piezo Stages Linear Piezo Stages (12) – Stages with Exchangeable Drive Units (25) High Load Stages (30) – Goniometer Stages (34) – Micro-Grippers (36) Rotation Stages (40) – Hybrid Drives (46) – Cryogenic Stages and Systems (49) Closed-Loop Cryogenic Stages (50) – Cryogenic Rotation Stages (52) Ultra High Vacuum Stages and Systems (54) – Non-Magnetic Stages and Systems (55) SMARFLEX – Nanoprecision Flexure Stages SMARSHIFT – High Precision Electromagnetic Direct Drives Electromagnetic Linear Stages (62) – Electromagnetic...
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Page 4 | Introduction | www.smaract.com
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Dear customer, Are you looking for innovative products to advance your applications in the field of high precision technology? Whether it’s positioning technology, metrology or automation technology, we are the right partner for you. Your confidence in our capabilities and joint successes have led our team to grow to 200 highly skilled members. Our ever-growing product portfolio includes proven items and/or systems for your diverse needs. In addition, we excel in designing special devices tailored to your needs and implementing them in an uncomplicated and speedy manner. We have strengthened...
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SmarAct Services Help & Support Your Partner for High Precision in Positioning, Automation and Metrology Customer Service Equipment Rental Service To meet your specific requirements – no matter whether it is a highly complex or a recurrent high-volume OEM positioning system – is our main interest. We will support you with maximum flexibility in developing and manufacturing custom solutions. Our team consists of experts with technical backgrounds in fields such as physics, materials science, optics and life science. Many of our positioning and metrology systems can be rented. We would be very...
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Help & Support www.smaract.com | Introduction | Page 7 SmarAct Services
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The SMARPOD is a hexapod-like positioning system which uses linear stages in a parallel kinematic design to create a positioning system with six degrees of freedom. motion Page 8 | High Precision Positioning | www.smaract.com
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SmarAct Motion High Precision Positioning Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions. SmarAct Motion develops and uses various technologies with specific advantages that you can discover on the following pages. We have developed this for you to meet the diverse requirements for high-precision positioning in different application areas. However, all fields of application have one thing in common: the need for very high accuracy and flexibility. A large range of standard components consisting of linear,...
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Piezo Stages SMARLIDE Stages Some Subline Text One of the three positioning turrets of a SMARPOD consisting of two SLC series stages and a guideway. Page 10 | High Precision Positioning | www.smaract.com
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SMARSLIDE – Piezo Stages Unique Features SMARSLIDE stages use SmarAct’s stick-slip piezo drive technology, which is unique in combining the unmatched resolution of the piezo motion principle with macroscopic travel ranges made possible by repeated stepping. The stages feature large positioning ranges from a few mm to over a meter for linear stages and of several degrees for rotation and goniometer stages. The SMARSLIDE positioners provide you with a number of advantages for your nanopositioning systems: High Resolution and Long Travel Range SMARSLIDE piezo stages provide closed-loop positioning...
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SMARSLIDE – Linear Piezo Stages SMARLIDE Stages SMARSLIDE Nanometer Piezo Stages Linear SMARSLIDE stages have high resolution, typical of piezos, combined with a large positioning range from a few mm to over a meter. SMARSLIDE includes several series of linear positioning stages. Each one was developed with our customers’ requirements in mind. The full compatibility between the components of the different product lines allows to select stages with specific key features to combine them into sophisticated multi-axis systems. SLC Series Linear stages of the SLC series are based on linear slides...
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SMARSLIDE – Linear Piezo Stages Overview SMARLIDE Stages Long travel SLC series stages can be mounted on top of each other to create gantries or large XY platforms. Blocking Force [N] Max. Normal Force [N] Max. Lift Force [N] Cross Section W x H [mm] Velocity [mm/s] Open-Loop Resolution [nm] Sensor Resolution [nm] UniDirectional Repeatability [nm]* Vacuum Compatibility * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using...
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SMARLIDE Stages Page 14 | High Precision Positioning | www.smaract.com
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SMARSLIDE – Linear Piezo Stages Stage Options at a Glance Higher Blocking Force For applications that require very low temperatures down to the mK range, specialized versions of our SLC, SR, SRT and STT stages are available. For high-performance positioning under cryogenic conditions, SmarAct offers closed-loop cryogenic stages. Please see page 49 for further information about stages and systems for cryogenic applications. The blocking force is the maximum external force a SMARSLIDE stage can withstand without slipping. It corresponds to the maximum force that can be applied by the stage to another...
Open the catalog to page 16All SmarAct GmbH catalogs and technical brochures
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Archived catalogs
Sensor Head C014 Pages
- SmarAct automation software
- Analysis software solution
- Incremental encoder
- Digital I/O
- Process software
- Analog I/O
- 3D software solution
- Motorized positioning table
- Measurement software
- SmarAct interface software
- Temperature controller
- SmarAct precision positioning stage
- Visualization software solution
- Motor controller
- Programming software
- SmarAct displacement sensor
- Development software