Copyright © 2025 SmarAct GmbH Specifications of components and systems presented in this catalog are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams, data etc. prohibited. The information given in this catalog has been carefully checked. Nevertheless, errors cannot be completely excluded. To always receive the latest information and specifications on our products, please contact our team or visit smaract.com. SmarAct GmbH, Schuette-Lanz-Straße 9, 26135 Oldenburg, Germany Phone: +49 (0) 441 - 800879-0 Internet: www.smaract.com E-mail: [email protected]...

Table of Contents Introduction SmarAct Motion SMARSLIDE – High Precision Piezo Stages Linear Piezo Stages (10) – Stages with Exchangeable Drive Units (23) High Load Stages (28) – Goniometer Stages (32) – Rotation Stages (34) Cryogenic Stages and Systems (43) – Closed-Loop Cryogenic Stages (44) Cryogenic Rotation Stages (46) – Ultra High Vacuum Stages and Systems (48) Non-Magnetic Stages and Systems (49) SMARFLEX – Nanoprecision Flexure Stages SMARSHIFT – High Precision Electromagnetic Direct Drives Electromagnetic Linear Stages (58) – Electromagnetic Rotation Stages (62) SMARBOTIC – High Precision...

Page 2 | Introduction | www.smaract.com

Dear customer, Are you looking for innovative products to advance your applications in the field of high precision technology? Whether it’s positioning technology, metrology or automation technology, we are the right partner for you. Your confidence in our capabilities and joint successes have led our team to grow to more than 270 highly skilled members. Our ever-growing product portfolio includes proven items and/or systems for your diverse needs. In addition, we excel in designing special devices tailored to your needs and implementing them in an uncomplicated and speedy manner. We have strengthened...

SmarAct Services Help & Support Your Partner for High Precision in Positioning, Automation and Metrology Customer Service Equipment Rental Service To meet your specific requirements – no matter whether it is a highly complex or a recurrent high-volume OEM positioning system – is our main interest. We will support you with maximum flexibility in developing and manufacturing custom solutions. Our team consists of experts with technical backgrounds in fields such as physics, materials science, optics and life science. Many of our positioning and metrology systems can be rented. We would be very...

Help & Support www.smaract.com | Introduction | Page 5 SmarAct Services

The SMARPOD® is a hexapod-like positioning system which uses linear stages in a parallel kinematic design to create a positioning system with six degrees of freedom.

SmarAct Motion High Precision Positioning Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions. SmarAct Motion develops and uses various technologies with specific advantages that you can discover on the following pages. We have developed this for you to meet the diverse requirements for high-precision positioning in different application areas. All fields of application have one thing in common: the need for very high accuracy and flexibility. A large range of standard components consisting of linear, rotation...

SMARSLIDE Stages One of the three positioning turrets of a SMARPOD consisting of two SLC series stages and a guideway. Page 8 | High Precision Positioning | www.smaract.com

SMARSLIDE® – Piezo Stages Unique Features SMARSLIDE stages use SmarAct’s stick-slip piezo drive technology, which is unique in combining the unmatched resolution of the piezo motion principle with macroscopic travel ranges made possible by repeated stepping. The stages feature large positioning ranges from a few mm to over a meter for linear stages and of several degrees for rotation and goniometer stages. The SMARSLIDE positioners provide you with a number of advantages for your nanopositioning systems: High Resolution and Long Travel Range SMARSLIDE piezo stages provide closed-loop positioning...

SMARSLIDE® – Linear Piezo Stages SMARSLIDE Stages SMARSLIDE Nanometer Piezo Stages Linear SMARSLIDE stages have high resolution, typical of piezos, combined with a large positioning range from a few mm to over a meter. SMARSLIDE includes several series of linear positioning stages. Each one was developed with our customers’ requirements in mind. The full compatibility between the components of the different product lines allows to select stages with specific key features to combine them into sophisticated multi-axis systems. SLC Series Linear stages of the SLC series are based on linear slides...

series stages create gantries or large XY * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using the advanced stepping mode. Closed-loop resolution and repeatability differ depending on the sensor type selected. For more information, please see the different sensor types on page 13.

SMARSLIDE Stages Page 12 | High Precision Positioning | www.smaract.com

Stage Options at a Glance For applications that require very low temperatures down to the mK range, specialized versions of our SLC, SR, SRT and STT stages are available. For high-performance positioning under cryogenic conditions, SmarAct offers closed-loop cryogenic stages. Please see page 43 for further information about stages and systems for cryogenic applications. Standard SMARSLIDE stages are configured to operate at atmospheric pressure. Specialized versions are available for high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-11 mbar) applications. As a complete solution provider,...

SMARSLIDE® - Linear Piezo StagesSLC-17 Series * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using the advanced stepping mode. Closed-loop resolution and repeatability differ depending on the sensor type selected. For more information, please see the different sensor types on page 13. Page 14 | High Precision Positioning | www.smaract.com