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CATALOG 2025
CATALOG 2025
SmarAct GmbH's 2025 catalog showcases its expertise in high precision technology, focusing on positioning, metrology, and automation. The company is committed to innovation and customer satisfaction, offering a wide range of products and custom solutions.
This section highlights SmarAct's high precision positioning solutions, emphasizing miniaturization and high-resolution requirements. Products include linear, rotation, and goniometer stages, micro-grippers, and control systems.
SMARSLIDE stages use stick-slip piezo drive technology, offering high resolution and long travel ranges. Features include compact design, self-clamping, low thermal drift, and vacuum compatibility.
These stages provide high resolution and dynamic scanning capabilities, suitable for applications requiring compliant structures.
SMARSHIFT stages offer fast and accurate electromagnetic positioning, ideal for high speed and precision applications.
This section covers complex positioning systems and robots with multiple degrees of freedom, including modular systems and hexapod-like configurations.
SmarAct provides versatile control systems and software development kits for easy integration into existing control environments.
The automation unit supports miniaturized component production, while the metrology unit offers high-resolution measurement tools like PICOSCALE interferometers and METIRIO optical encoders.
SMARPROBE is a nano-probing platform for failure analysis on wafers, ASICS, and MEMS.
SmarAct emphasizes quality and customer service, offering customization, equipment rental, and laboratory services. The company is ISO 9001:2015 certified.
The document details specifications for SMARSLIDE® Linear Piezo Stages, focusing on the SLC, SL, CLS, and CLL series, designed for high precision positioning with various configurations.
Optical and inductive sensors can be integrated for closed-loop position control.
The blocking force is the maximum external force a stage can withstand without slipping.
A constant force spring can be integrated to lift a constant, vertically arranged load.
SLC series stages are available with a U-shaped base for increased mechanical strength.
SLC-17 stages are compact with travel ranges up to 51 mm, while SLC-24 offers more rigidity and travel ranges up to 123 mm.
Ultra-compact stages designed for setups with space constraints.
EDUs are designed for quick replacement to minimize downtime during maintenance.
CLS stages can be combined into XY stages, while CLL stages are suitable for precise positioning over long distances.
- Travel ranges up to 123 mm for SLC-24 and 619 mm for CLL.
- Blocking force generally ≥ 3.5 N.
- Open-loop velocity typically > 20 mm/s.
- Material options include aluminum, steel, and titanium bases.
- Vacuum options include HV (10-6 mbar) and UHV (10-11 mbar).
The document provides detailed information on SMARSLIDE stages, including linear, high load, goniometer, rotation, and cryogenic stages.
Details mechanical and operational specifications of different SMARSLIDE stages.
Various accessories are available to customize the CLL system.
The CHS and SHL series are highlighted for their ability to handle heavy loads.
Designed for precise rotation over small angles and continuous rotation.
Optimized for use in cryogenic environments.
Suitable for a wide range of applications, including photonics and quantum science.
Details on electromagnetic linear and rotational stages, as well as modular and customizable positioning systems.
Designed for high precision and modularity, allowing for customization and integration into various setups.
Allows for the creation of complex multi-axis positioning systems using standardized components.
Examples of positioning systems, such as a 6D positioning system and a 5D micromanipulation device.
Pre-defined systems are available, offering solutions for common positioning tasks.
Details on SMARBOTIC® positioning systems, including 3 DoF, 4 DoF, and 6 DoF systems.
Use linear and rotation stages for precise positioning.
Hexapod-like systems offering six degrees of freedom.
Combines serial and parallel kinematics for modular multidimensional positioning.
Includes control software with graphical interfaces and programming examples.
Designed for high stiffness, vacuum compatibility, and non-magnetic applications.
Details on SMARSHIFT® MLS-92122 and EM TRIPOD systems, offering large travel ranges and dynamic performance.
- Travel: 200 mm (X, Y), 16 mm (Z); 6° (Θx), 7° (Θy), ≥360° (Θz)
- Max. Normal Force: 60 N
- Dimensions: 400 x 400 mm base plate, 183 mm height
- Weight: 31,000 g
- Smallest Increment: 1 nm, 3 µ°
- Uni-Directional Repeatability: ±100 nm (X, Y), ±25 nm (Z)
Designed for XRD setups, offering large rotation angles and additional tilt.
Micro-grippers with various designs optimized for specific applications.
Allow precise sample handling and manipulation, essential for microscopy workstations.
The MCS2 control system manages the XY stage and micro-manipulators.
Includes motorized optomechanical components like tip-tilt mirror mounts and filter wheels.
Details on motorized optomechanics and control systems, including tip-tilt mirror mounts and filter wheels.
Designed for different mirror sizes and applications.
Offer independently movable blades for defining optical paths.
Accommodate various filter sizes and numbers.
Designed for easy integration and use with positioning technology.
SmarAct provides a comprehensive range of motorized optomechanics and control systems tailored for precision positioning in optical experiments.
Focuses on application programming environment, control units, and automation solutions.
Supports multiple programming languages and facilitates easy integration.
Includes one and three-channel drivers for controlling stick-slip piezo stages.
Designed for OEM integration, suitable for control electronics design.
Controls SmarAct motion systems and supports various interfaces.
A user-configurable interface for controlling SmarAct positioners.
Offers high-precision automation solutions for microassembly.
Specializes in high-precision measurement solutions.
Features high resolution and compatibility with various scales.
Details on METIRIO encoder measuring scales and PICOSCALE Interferometer system.
Designed for high precision measurements with incremental track and reference marks.
Includes sensor configuration software and motion controller compatibility.
A contact-free displacement measurement system using a Michelson interferometer principle.
- Maximum bandwidth of position data: 2.9 MHz
- Working distance: 20 mm
- Laser wavelength: 1550 nm
- Measurement conditions: Ambient, ultra-high vacuum, cryogenics
Various sensor heads available for different applications.
Includes a software API compatible with LabVIEW, C/C++, and Python.
Used in various applications, including synchrotron beamlines and motor position encoding.
Designed for measuring vibrations in micromechanical structures.
Provides specifications for various components and systems, including the PICOSCALE Vibrometer and SMARPROBE motion system.
Measurement procedures include single point measurements and characterization of ultrasonic transducers.
Characterization of ultrasonic transducers is conducted according to ISO 24543 standards.
Recommendations include using the PICOSCALE Vibrometer for megapixel modal analysis.
Examples include measuring motion on ultrasonic transducers and MEMS through silicon imaging.
SmarAct offers measurement and rental services to simplify development processes.
Applications span multiple sectors, including semiconductors and photonics.
Discusses various applications of SmarAct's precision positioning systems in high-energy research facilities.
Used to position and align lenses with nanometer precision in high-vacuum environments.
3D printer stage used for operando studies of additive manufacturing processes.
Cryo-compatible positioners used to align optics in the Very Large Telescope array.
SMARPODs used to align components in laser-plasma acceleration experiments.
Multi-axis positioning system used for precise sample positioning and probing.
Motorized condenser holder improves alignment and illumination in FTIR spectroscopy.
7D sample stage used for precise X-ray imaging and tomography.
Goniometer system facilitates automated sample delivery in SFX experiments.
Customized rotation stage used for soft X-ray laminography.
SMARSLIDE® piezo stages used to explore quantum communications.
3D-Micromac's microPREP™ PRO used for high-volume sample preparation.
SMARPOD used for precise positioning in semiconductor research.
Piezo-driven stages used in a drug delivery platform for precision treatment.
High-precision microscope stage used for two-photon polymerization.
Linear positioners used in cellular force microscopy.
Automates the assembly of FAC lenses to laser diodes.
PICOSCALE Interferometer used to redefine the kilogram.
METIRIO® A1 encoder used in nanoscratching experiments.
SmarAct Group specializes in high-precision positioning, automation, and metrology solutions.
Founded in 2005, SmarAct has expanded to a group with over 270 skilled members.
SmarAct has a global presence with offices in Korea, Germany, France, the USA, and China.
Catalog excerpts
Copyright © 2025 SmarAct GmbH Specifications of components and systems presented in this catalog are subject to change without notice. All rights reserved. Reproduction of images, tables or diagrams, data etc. prohibited. The information given in this catalog has been carefully checked. Nevertheless, errors cannot be completely excluded. To always receive the latest information and specifications on our products, please contact our team or visit smaract.com. SmarAct GmbH, Schuette-Lanz-Straße 9, 26135 Oldenburg, Germany Phone: +49 (0) 441 - 800879-0 Internet: www.smaract.com E-mail: [email protected]...
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Table of Contents Introduction SmarAct Motion SMARSLIDE – High Precision Piezo Stages Linear Piezo Stages (10) – Stages with Exchangeable Drive Units (23) High Load Stages (28) – Goniometer Stages (32) – Rotation Stages (34) Cryogenic Stages and Systems (43) – Closed-Loop Cryogenic Stages (44) Cryogenic Rotation Stages (46) – Ultra High Vacuum Stages and Systems (48) Non-Magnetic Stages and Systems (49) SMARFLEX – Nanoprecision Flexure Stages SMARSHIFT – High Precision Electromagnetic Direct Drives Electromagnetic Linear Stages (58) – Electromagnetic Rotation Stages (62) SMARBOTIC – High Precision...
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Page 2 | Introduction | www.smaract.com
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Dear customer, Are you looking for innovative products to advance your applications in the field of high precision technology? Whether it’s positioning technology, metrology or automation technology, we are the right partner for you. Your confidence in our capabilities and joint successes have led our team to grow to more than 270 highly skilled members. Our ever-growing product portfolio includes proven items and/or systems for your diverse needs. In addition, we excel in designing special devices tailored to your needs and implementing them in an uncomplicated and speedy manner. We have strengthened...
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SmarAct Services Help & Support Your Partner for High Precision in Positioning, Automation and Metrology Customer Service Equipment Rental Service To meet your specific requirements – no matter whether it is a highly complex or a recurrent high-volume OEM positioning system – is our main interest. We will support you with maximum flexibility in developing and manufacturing custom solutions. Our team consists of experts with technical backgrounds in fields such as physics, materials science, optics and life science. Many of our positioning and metrology systems can be rented. We would be very...
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Help & Support www.smaract.com | Introduction | Page 5 SmarAct Services
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The SMARPOD® is a hexapod-like positioning system which uses linear stages in a parallel kinematic design to create a positioning system with six degrees of freedom.
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SmarAct Motion High Precision Positioning Miniaturization in all fields of application increases the demand and requirements for compact and high-resolution positioning solutions. SmarAct Motion develops and uses various technologies with specific advantages that you can discover on the following pages. We have developed this for you to meet the diverse requirements for high-precision positioning in different application areas. All fields of application have one thing in common: the need for very high accuracy and flexibility. A large range of standard components consisting of linear, rotation...
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SMARSLIDE Stages One of the three positioning turrets of a SMARPOD consisting of two SLC series stages and a guideway. Page 8 | High Precision Positioning | www.smaract.com
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SMARSLIDE® – Piezo Stages Unique Features SMARSLIDE stages use SmarAct’s stick-slip piezo drive technology, which is unique in combining the unmatched resolution of the piezo motion principle with macroscopic travel ranges made possible by repeated stepping. The stages feature large positioning ranges from a few mm to over a meter for linear stages and of several degrees for rotation and goniometer stages. The SMARSLIDE positioners provide you with a number of advantages for your nanopositioning systems: High Resolution and Long Travel Range SMARSLIDE piezo stages provide closed-loop positioning...
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SMARSLIDE® – Linear Piezo Stages SMARSLIDE Stages SMARSLIDE Nanometer Piezo Stages Linear SMARSLIDE stages have high resolution, typical of piezos, combined with a large positioning range from a few mm to over a meter. SMARSLIDE includes several series of linear positioning stages. Each one was developed with our customers’ requirements in mind. The full compatibility between the components of the different product lines allows to select stages with specific key features to combine them into sophisticated multi-axis systems. SLC Series Linear stages of the SLC series are based on linear slides...
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series stages create gantries or large XY * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using the advanced stepping mode. Closed-loop resolution and repeatability differ depending on the sensor type selected. For more information, please see the different sensor types on page 13.
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SMARSLIDE Stages Page 12 | High Precision Positioning | www.smaract.com
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Stage Options at a Glance For applications that require very low temperatures down to the mK range, specialized versions of our SLC, SR, SRT and STT stages are available. For high-performance positioning under cryogenic conditions, SmarAct offers closed-loop cryogenic stages. Please see page 43 for further information about stages and systems for cryogenic applications. Standard SMARSLIDE stages are configured to operate at atmospheric pressure. Specialized versions are available for high vacuum (HV, 10-6 mbar) and ultra-high vacuum (UHV, 10-11 mbar) applications. As a complete solution provider,...
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SMARSLIDE® - Linear Piezo StagesSLC-17 Series * Measured 10 mm above the top surface of the slide and along the line of symmetry. Measured over the complete travel range. An improvement can be expected for shorter travel ranges. ** This specification can be improved by using the advanced stepping mode. Closed-loop resolution and repeatability differ depending on the sensor type selected. For more information, please see the different sensor types on page 13. Page 14 | High Precision Positioning | www.smaract.com
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