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  3. Technical data sheet: Triple beam laser interferometer SP 5000 TR

Technical data sheet: Triple beam laser interferometer SP 5000 TR

Technical data sheet: Triple beam laser interferometer SP 5000 TR

Product catalog summary
System Specifications:
The Triple-Beam Interferometer SP 5000 TR offers a measuring range from 0 m to ≥8 m with a standard reflector and up to ≥20 m with a long-range reflector. It provides a resolution of 20 pm, with angular measuring ranges of ±12.5° using a reflector and ±430 µrad with a plane mirror (recommended distance ≤2 m). The angular resolution is 0.01 µrad.

Optional Roll Angle Measurement:
The system can optionally measure roll angles with the RAS 175 W sensor, offering a measuring range of ±17.5 mrad and a resolution of 0.9 µrad.

Measurement Uncertainty:
Under stable conditions, the length measurement uncertainty is 0.15 µm/m, angle measurement uncertainty is ±0.04% ± 0.04 μrad, and roll angle measurement uncertainty is ±2.4 µrad ±0.5% (19°C – 21°C) or ±2.4 µrad ±1.5% (15°C – 25°C).

Physical and Operational Characteristics:
The beam distances are 12 mm horizontally and vertically, with a wavelength of 632.8 nm. The HeNe laser has a frequency stability of 2·10-8 after a warm-up time of 10 to 20 minutes. The operating temperature range is 15 to 30°C, and the maximum displacement speed of the measuring reflector is 3 m/s.

Geometric Data:
The sensor head with adjustable mount measures 202 x 137 x 72 mm and weighs 1.9 kg. The reflector is 45 x 45 x 20 mm and weighs 80 g. The electronic evaluation and supply unit (EU) measures 450 x 400 x 150 mm and weighs approximately 8 kg. The optional roll angle sensor RAS 175 W measures 74 x 54 x 77 mm and weighs 425 g.

Electrical Data:
The system includes standard RS232C and USB interfaces, with other interfaces available on request. The cable length between the sensor head and electronics unit is 6 m, with other lengths available on request. The power supply requirement is 100 to 240 VAC / 47 to 63 Hz.

Safety and Compliance:
The laser safety class is 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH). For legal reasons, some devices have a resolution limited to 0.3 nm, marked with an “X” on the type label.

Note: Specifications are subject to change as of October 2026.
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Catalog excerpts

Technical data sheet: Triple beam laser interferometer SP 5000 TR-1

Technical data sheet *For legal reasons, the resolution of some devices is limited to 0.3 nm. These devices are marked with an “X" on the type label. **rotary point dependent ***least significant bit (LSB) 10/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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