Technical data sheet: Triple beam laser interferometer SP 5000 TR

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Technical data sheet: Triple beam laser interferometer SP 5000 TR

Product catalog summary

Technical Specifications:

Measuring Range: 0 m to ≥8 m with standard reflector; 0 m to ≥20 m with long-range reflector.
Resolution: 20 pm in frequency domain.
Angular Measuring Ranges: ±12.5° with reflector; ±430 µrad with plane mirror (recommended distance ≤2 m).
Angular Resolution: 0.01 µrad (least significant bit).
Roll Angle Measurement (Optional with RAS 175 W): Measuring range ±17.5 mrad; Resolution 0.9 µrad.
Measuring Uncertainty: Length measurement 0.15 µm/m; Angle measurement ±0.04% ± 0.04 μrad; Roll angle measurement ±2.4 µrad ±0.5% (19°C – 21°C) and ±2.4 µrad ±1.5% (15°C – 25°C).
Beam Distances: 12 mm (horizontal and vertical).
Wavelength: 632.8 nm.
Frequency Stability: 2·10-8 after warm-up time.
Warm-up Time: 10 to 20 minutes.
Operating Temperature Range: 15 to 30°C.
Max. Displacement Speed: 3 m/s.

Geometric Data:

Dimensions: Sensor head with adjustable mount [202 x 137 x 72] mm; Reflector [45 x 45 x 20] mm; Electronic evaluation and supply unit EU [450 x 400 x 150] mm; Roll angle sensor RAS 175 W (optional) [74 x 54 x 77] mm.
Mass: Sensor head with adjustable mount 1.9 kg; Reflector 80 g; Electronic evaluation and supply unit EU approx. 8 kg; Roll angle sensor RAS 175 W (optional) 425 g.

Electrical Data:

Interfaces: Standard RS232C, USB; other interfaces available on request.
Cable Length: 6 m between sensor head and electronics unit; other lengths available on request.
Power Supply: 100 to 240 VAC / 47 to 63 Hz.
Laser Safety Class: According to EN 60825-1:2014 and ANSI Z136.1 (CDRH) - 2M, II.

Note: Specifications are subject to change as of 08/2026.

Catalog excerpts

Technical data sheet: Triple beam laser interferometer SP 5000 TR-1

Technical data sheet *in frequency domain **rotary point dependent ***least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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