Technical data sheet: Laser interferometer SP 5000 NG / SP 15000 NG
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Technical data sheet Laser Interferometer SP-NG Series System parameter *in frequency domain 04/2024 • Subject to change. SIOS MeBtechnik GmbH 98693 Ilmenau/Germany • Am Vogelherd 46 • Tel.: +49 (0) 3677 64 47-0 • contact@sios.de • www.sios-precision.com

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