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  3. Technical data sheet: Double beam laser interferometer SP 5000 DS

Technical data sheet: Double beam laser interferometer SP 5000 DS

Technical data sheet: Double beam laser interferometer SP 5000 DS
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Technical data sheet: Double beam laser interferometer SP 5000 DS

Product catalog summary
System Specifications:
  • Measuring Range: 0 m to ≥ 5 m
  • Resolution: 20 pm (with some devices limited to 0.3 nm)
  • Angular Measuring Ranges:
    • With reflector: ±12.5°
    • With plane mirror (recommended distance ≤2 m): ±430 µrad
  • Angular Resolution: 0.01 µrad at 0.1 nm length resolution
  • Beam Distances: 12 mm (horizontal and vertical)
  • Wavelength: 632.8 nm
  • Frequency Stability: 2 · 10-8 after warm-up
  • Warm-up Time: 10 to 20 minutes
  • Operating Temperature Range: 15 to 30°C
  • Max Displacement Speed: 3 m/s
Geometric Data:
  • Dimensions:
    • Sensor head with adjustable mount: 199 x 134 x 68 mm
    • Electronic evaluation and supply unit: 450 x 400 x 150 mm
  • Mass:
    • Sensor head with adjustable mount: 1.6 kg
    • Electronic evaluation and supply unit: approximately 8 kg
Electronic Data:
  • Interfaces: Standard RS232C, USB; other interfaces available on request
  • Cable Length: 6 m, with other lengths available on request
  • Power Supply: 100 to 240 VAC / 47 to 63 Hz
  • Laser Safety Class: 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH)
Additional Notes:
  • Devices with limited resolution are marked with an “X” on the type label.
  • Specifications are subject to change by October 2026.
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Catalog excerpts

Technical data sheet: Double beam laser interferometer SP 5000 DS-1

Technical data sheet *For legal reasons, the resolution of some devices is limited to 0.3 nm. These devices are marked with an “X" on the type label. **rotary point dependent ***least significant bit (LSB) 10/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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