Technical data sheet: Double beam laser interferometer SP 5000 DS

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Technical data sheet: Double beam laser interferometer SP 5000 DS

Product catalog summary

Technical Specifications

Measuring Range: 0 m to ≥ 5 m
Resolution: 20 pm in frequency domain
Angular Measuring Ranges: ±12.5° with reflector, ±430 µrad with plane mirror (recommended distance ≤2 m)
Angular Resolution: 0.01 µrad at 0.1 nm length resolution
Beam Distances: 12 mm (horizontal and vertical)
Wavelength: 632.8 nm
Frequency Stability: 2 · 10^-8 after warm-up
Warm-up Time: 10 to 20 minutes
Operating Temperature Range: 15 to 30°C
Max Displacement Speed: 3 m/s

Geometric Data

Dimensions: Sensor head with adjustable mount: 199 x 134 x 68 mm; Electronic evaluation and supply unit: 450 x 400 x 150 mm
Mass: Sensor head: 1.6 kg; Electronic unit: approx. 8 kg

Electronic Data

Interfaces: Standard RS232C, USB; other interfaces available on request
Cable Length: 6 m between sensor head and electronics unit; other lengths available on request
Power Supply: 100 to 240 VAC / 47 to 63 Hz
Laser Safety Class: 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH)

Note: Specifications are subject to change as of 08/2026.

Catalog excerpts

Technical data sheet: Double beam laser interferometer SP 5000 DS-1

Technical data sheet *in frequency domain **rotary point dependent ***least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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