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Technical data sheet: Differential laser interferometer SP 5000 DI / SP 5000 DI/F

Technical data sheet: Differential laser interferometer SP 5000 DI / SP 5000 DI/F

Product catalog summary
Technical Specifications
  • Measurement Range: 0 m to ≥ 5 m
  • Resolution: 5 pm in frequency domain
  • Angular Measurement Range:
    • With reflector: ±12.5° (SP 5000 DI), ±15° (SP 5000 DI/F)
    • With plane mirror (recommended distance ≤2 m): ±430 µrad
  • Angular Resolution: 0.005 µrad (SP 5000 DI), 0.007 µrad (SP 5000 DI/F)
  • Beam Distance: 21 mm (SP 5000 DI), 14 mm (SP 5000 DI/F)
  • Temperature Sensitivity: <20 nm/K (SP 5000 DI), <10 nm/K (SP 5000 DI/F)
  • Wavelength: 632.8 nm
  • Frequency Stability: 2·10-8 after warm-up
  • Warm-up Time: 10 to 20 minutes
  • Operating Temperature Range: 15 to 30°C
  • Maximum Displacement Speed: 3 m/s
Geometric Data
  • Sensor Head Dimensions: 150 x 140 x 43 mm (SP 5000 DI), 110 x 65 x 33 mm (SP 5000 DI/F)
  • Reflector Dimensions: Ø 15 mm x 15 mm (SP 5000 DI), Ø 10 mm x 15 mm (SP 5000 DI/F)
  • Electronic Evaluation Unit Dimensions: 450 x 400 x 150 mm
  • Mass:
    • Sensor Head: 2.0 kg (SP 5000 DI), 1.1 kg (SP 5000 DI/F)
    • Base Plate: 1.5 kg (SP 5000 DI)
    • Reflector: 8 g (SP 5000 DI), 6 g (SP 5000 DI/F)
    • Electronic Evaluation Unit: approx. 8 kg
Electrical Data
  • Interfaces: RS232C, USB (standard); other interfaces on request
  • Cable Length: 6 m (standard); other lengths on request
  • Power Supply: 100 to 240 VAC / 47 to 63 Hz
  • Laser Safety Class: 2M according to EN 60825-1:2014 and ANSI Z136.1 (CDRH)

Note: Specifications are subject to change. Document dated 08/2026.

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Catalog excerpts

Technical data sheet: Differential laser interferometer SP 5000 DI / SP 5000 DI/F-1

Technical data sheet *in frequency domain ** rotary point dependent ***least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.