Technical data sheet: Differential laser interferometer SP 5000 DI / SP 5000 DI/F
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Technical data sheet Differential Interferometer SP 5000 DI Series System parameter *in frequency domain ** rotary point dependent ***least significant bit (LBS) 04/2024 • Subject to change. SIOS MeBtechnik GmbH 98693 Ilmenau/Germany • Am Vogelherd 46 • Tel.: +49 (0) 3677 64 47-0 • contact@sios.de • www.sios-precision.com

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