Technical Data Sheet Summary: Calibration Interferometer SP 15000 C6 NG
System Parameters:
- Length Measurement: Range: 0 m – 50 m, Resolution: 0.3 nm
- Angle Measurement: Pitch and Yaw: ±5° range, 0.05 µrad resolution; Roll: ±17.5 mrad range, 0.9 µrad resolution
- Straightness Measurement: Lateral range: ±4 mm, Resolution: 10 nm, Axial range: 0.1 ... 4 m / 0.3 ... 10 m
- Measuring Uncertainty: Length: ±0.2 µm/m; Angle: ±0.04% ± 0.04 µrad; Straightness: 0.1 to 4 m: ±0.1% ± 0.1·(M)² μm ± 0.25 μm, 0.3 to 10 m: ±0.15% ± 0.1·(M)² μm ± 0.25 μm; Roll: ±2.4 µrad ±0.5% (19°C – 21°C), ±2.4 µrad ±1.5% (15°C – 25°C)
- Beam Distance: 50 mm
- Wavelength: 632.8 nm
- Frequency Stability: 2·10-8
- Warm-up Time: 20 min
- Operating Temperature: 15 ... 30°C
- Max Displacement Speed: 3 m/s
Geometric Data:
- Dimensions: Sensor head: [284 x 168 x 141] mm, Reflector unit: [74 x 81 x 88] mm, Straightness mirror: [132 x 103 x 82] mm, Electronic unit: [450 x 450 x 150] mm, Roll angle sensor: [74 x 54 x 77] mm
- Mass: Sensor head: 5.2 kg, Reflector unit: 585 g, Straightness mirror: 600 g, Electronic unit: 11 kg, Roll angle sensor: 425 g each
Electrical Data:
- Interfaces: Standard USB, other interfaces on request
- Cable Length: 6 m, other lengths on request
- Power Supply: 100 ... 240 VAC / 47 ... 63 Hz
- Laser Safety Class: 2M, II according to EN 60825-1:2014 and ANSI Z136.1 (CDRH)
Note: Specifications are subject to change.
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