1. Catalogs
  2. SIOS Meßtechnik GmbH
  3. Technical data sheet: Calibration laser interferometer SP 15000 C6 NG

Technical data sheet: Calibration laser interferometer SP 15000 C6 NG

Technical data sheet: Calibration laser interferometer SP 15000 C6 NG

Technical data sheet: Calibration laser interferometer SP 15000 C6 NG

Product catalog summary
Technical Data Sheet Summary: Calibration Interferometer SP 15000 C6 NG
System Parameters:
  • Length Measurement: Range: 0 m – 50 m, Resolution: 0.3 nm
  • Angle Measurement: Pitch and Yaw: ±5° range, 0.05 µrad resolution; Roll: ±17.5 mrad range, 0.9 µrad resolution
  • Straightness Measurement: Lateral range: ±4 mm, Resolution: 10 nm, Axial range: 0.1 ... 4 m / 0.3 ... 10 m
  • Measuring Uncertainty: Length: ±0.2 µm/m; Angle: ±0.04% ± 0.04 µrad; Straightness: 0.1 to 4 m: ±0.1% ± 0.1·(M)² μm ± 0.25 μm, 0.3 to 10 m: ±0.15% ± 0.1·(M)² μm ± 0.25 μm; Roll: ±2.4 µrad ±0.5% (19°C – 21°C), ±2.4 µrad ±1.5% (15°C – 25°C)
  • Beam Distance: 50 mm
  • Wavelength: 632.8 nm
  • Frequency Stability: 2·10-8
  • Warm-up Time: 20 min
  • Operating Temperature: 15 ... 30°C
  • Max Displacement Speed: 3 m/s
Geometric Data:
  • Dimensions: Sensor head: [284 x 168 x 141] mm, Reflector unit: [74 x 81 x 88] mm, Straightness mirror: [132 x 103 x 82] mm, Electronic unit: [450 x 450 x 150] mm, Roll angle sensor: [74 x 54 x 77] mm
  • Mass: Sensor head: 5.2 kg, Reflector unit: 585 g, Straightness mirror: 600 g, Electronic unit: 11 kg, Roll angle sensor: 425 g each
Electrical Data:
  • Interfaces: Standard USB, other interfaces on request
  • Cable Length: 6 m, other lengths on request
  • Power Supply: 100 ... 240 VAC / 47 ... 63 Hz
  • Laser Safety Class: 2M, II according to EN 60825-1:2014 and ANSI Z136.1 (CDRH)
Note: Specifications are subject to change.
See more

Catalog excerpts

Technical data sheet: Calibration laser interferometer SP 15000 C6 NG-1

Technical data sheet SIOS MeBtechnik GmbH

 Open the catalog to page 1
Technical data sheet: Calibration laser interferometer SP 15000 C6 NG-2

Technical data sheet *least significant bit (LSB) 08/2026 ■ Subject to change. SIOS MeBtechnik GmbH

 Open the catalog to page 2
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.